Koji Egashira

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus
- Patent number 9,452,452
- Issue date Sep 27, 2016
- Tokyo Electron Limited
- Koji Egashira
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 9,305,818
- Issue date Apr 5, 2016
- Tokyo Electron Limited
- Yuji Kamikawa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Liquid processing apparatus
- Patent number 9,272,310
- Issue date Mar 1, 2016
- Tokyo Electron Limited
- Koji Egashira
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 8,851,819
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Yuji Kamikawa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Ultrasonic cleaning apparatus, ultrasonic cleaning method, and stor...
- Patent number 8,567,417
- Issue date Oct 29, 2013
- Tokyo Electron Limited
- Yuji Kamikawa
- B08 - CLEANING
Information Patent Grant
Batch forming apparatus, substrate processing system, batch forming...
- Patent number 8,002,511
- Issue date Aug 23, 2011
- Tokyo Electron Limited
- Yuji Kamikawa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Liquid processing apparatus and method
- Patent number 7,412,981
- Issue date Aug 19, 2008
- Tokyo Electron Limited
- Koji Egashira
- B08 - CLEANING
Information Patent Grant
Rotary shaft sealing mechanism and liquid processing apparatus
- Patent number 7,347,214
- Issue date Mar 25, 2008
- Tokyo Electron Limited
- Koji Egashira
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Liquid processing apparatus with nozzle having planar ejecting orif...
- Patent number 7,314,054
- Issue date Jan 1, 2008
- Tokyo Electron Limited
- Koji Egashira
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 7,240,680
- Issue date Jul 10, 2007
- Tokyo Electron Limited
- Koji Egashira
- B08 - CLEANING
Information Patent Grant
Rotary substrate processing apparatus and method
- Patent number 6,743,297
- Issue date Jun 1, 2004
- Tokyo Electron Limited
- Koji Egashira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus
- Patent number 6,725,868
- Issue date Apr 27, 2004
- Tokyo Electron Limited
- Yuji Kamikawa
- B08 - CLEANING
Information Patent Grant
Processing apparatus with sealing mechanism
- Patent number 6,698,439
- Issue date Mar 2, 2004
- Tokyo Electron Limited
- Yuji Kamikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus and method
- Patent number 6,663,721
- Issue date Dec 16, 2003
- Tokyo Electron Limited
- Koji Egashira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotary processing apparatus with holding bars having drain grooves
- Patent number 6,568,412
- Issue date May 27, 2003
- Tokyo Electron Limited
- Koji Egashira
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180240684
- Publication date Aug 23, 2018
- TOKYO ELECTRON LIMITED
- Koji Egashira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140356106
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Yuji KAMIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20130233360
- Publication date Sep 12, 2013
- TOKYO ELECTRON LIMITED
- Koji Egashira
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20130233361
- Publication date Sep 12, 2013
- TOKYO ELECTRON LIMITED
- Koji Egashira
- B08 - CLEANING
Information Patent Application
ULTRASONIC CLEANING APPARATUS, ULTRASONIC CLEANING METHOD, AND STOR...
- Publication number 20110079240
- Publication date Apr 7, 2011
- TOKYO ELECTRON LIMITED
- Yuji KAMIKAWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100215461
- Publication date Aug 26, 2010
- TOKYO ELECTRON LIMITED
- Yuji KAMIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Batch forming apparatus, substrate processing system, batch forming...
- Publication number 20090010748
- Publication date Jan 8, 2009
- Yuji Kamikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing apparatus and method
- Publication number 20070028950
- Publication date Feb 8, 2007
- Koji Egashira
- B08 - CLEANING
Information Patent Application
Substrate processing apparatus
- Publication number 20030221713
- Publication date Dec 4, 2003
- TOKYO ELECTRON LIMITED
- Koji Egashira
- B08 - CLEANING
Information Patent Application
Rotary shaft sealing mechanism and liquid processing apparatus
- Publication number 20030178785
- Publication date Sep 25, 2003
- Koji Egashira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Rotary substrate processing apparatus and method
- Publication number 20020170571
- Publication date Nov 21, 2002
- Koji Egashira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing apparatus
- Publication number 20020056471
- Publication date May 16, 2002
- Yuji Kamikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing apparatus with sealing mechanism
- Publication number 20020053367
- Publication date May 9, 2002
- Yuji Kamikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Rotary processing apparatus
- Publication number 20020029852
- Publication date Mar 14, 2002
- Koji Egashira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing apparatus and method
- Publication number 20020029789
- Publication date Mar 14, 2002
- TOKYO ELECTRON LIMITED
- Koji Egashira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing apparatus and method
- Publication number 20010013555
- Publication date Aug 16, 2001
- Koji Egashira
- H01 - BASIC ELECTRIC ELEMENTS

Koji Egashira

Person

Patents Grantslast 30 patents

Liquid processing apparatus

Substrate processing apparatus

Liquid processing apparatus

Substrate processing apparatus

Ultrasonic cleaning apparatus, ultrasonic cleaning method, and stor...

Batch forming apparatus, substrate processing system, batch forming...

Liquid processing apparatus and method

Rotary shaft sealing mechanism and liquid processing apparatus

Liquid processing apparatus with nozzle having planar ejecting orif...

Substrate processing apparatus

Rotary substrate processing apparatus and method

Liquid processing apparatus

Processing apparatus with sealing mechanism

Liquid processing apparatus and method

Rotary processing apparatus with holding bars having drain grooves

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

LIQUID PROCESSING APPARATUS

LIQUID PROCESSING APPARATUS

ULTRASONIC CLEANING APPARATUS, ULTRASONIC CLEANING METHOD, AND STOR...

SUBSTRATE PROCESSING APPARATUS

Batch forming apparatus, substrate processing system, batch forming...

Liquid processing apparatus and method

Substrate processing apparatus

Rotary shaft sealing mechanism and liquid processing apparatus

Rotary substrate processing apparatus and method

Liquid processing apparatus

Processing apparatus with sealing mechanism

Rotary processing apparatus

Liquid processing apparatus and method

Liquid processing apparatus and method