Koji Harada

Person

Kikuyo-Machi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method
- Patent number 6,921,554
- Issue date Jul 26, 2005
- Tokyo Electron Limited
- Koji Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment unit, cooling unit and cooling treatment method
- Patent number 6,686,571
- Issue date Feb 3, 2004
- Tokyo Electron Limited
- Jun Ookura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus, processing system, distinguishing method, and...
- Patent number 6,654,668
- Issue date Nov 25, 2003
- Tokyo Electron Limited
- Koji Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,644,965
- Issue date Nov 11, 2003
- Tokyo Electron Limited
- Jun Ookura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for eliminating impurities by ozone generated in space ab...
- Patent number 6,465,055
- Issue date Oct 15, 2002
- Tokyo Electron Limited
- Koji Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment unit, cooling unit and cooling treatment method
- Patent number 6,461,438
- Issue date Oct 8, 2002
- Tokyo Electron Limited
- Jun Ookura
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,402,509
- Issue date Jun 11, 2002
- Tokyo Electron, Limited
- Jun Ookura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing unit
- Patent number 6,402,844
- Issue date Jun 11, 2002
- Tokyo Electron Limited
- Koji Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat and cooling treatment apparatus and substrate processing system
- Patent number 6,402,508
- Issue date Jun 11, 2002
- Tokyo Electron Limited
- Koji Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment apparatus and treatment method
- Patent number 6,368,776
- Issue date Apr 9, 2002
- Tokyo Electron Limited
- Koji Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing solution supplying apparatus, processing apparatus and p...
- Patent number 6,202,653
- Issue date Mar 20, 2001
- Tokyo Electron Ltd.
- Koji Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for eliminating impurities by ozone generated in space ab...
- Patent number 6,190,458
- Issue date Feb 20, 2001
- Tokyo Electron Limited
- Koji Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adhesion apparatus
- Patent number 6,156,125
- Issue date Dec 5, 2000
- Tokyo Electron Limited
- Koji Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Washing apparatus, and washing method
- Patent number 5,887,604
- Issue date Mar 30, 1999
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING
Information Patent Grant
Method for washing objects
- Patent number 5,782,990
- Issue date Jul 21, 1998
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING
Information Patent Grant
Washing apparatus, and washing method
- Patent number 5,671,764
- Issue date Sep 30, 1997
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING
Information Patent Grant
Washing apparatus, and washing method
- Patent number 5,488,964
- Issue date Feb 6, 1996
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Heat treatment unit, cooling unit and cooling treatment method
- Publication number 20030005707
- Publication date Jan 9, 2003
- TOKYO ELECTRON LIMITED
- Jun Ookura
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate processing method and substrate processing unit
- Publication number 20020153351
- Publication date Oct 24, 2002
- Koji Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20020072025
- Publication date Jun 13, 2002
- Jun Ookura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat and cooling treatment apparatus and substrate processing system
- Publication number 20010013515
- Publication date Aug 16, 2001
- Koji Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for eliminating impurities by ozone generated in space ab...
- Publication number 20010000477
- Publication date Apr 26, 2001
- TOKYO ELECTRON LIMITED
- Koji Harada
- H01 - BASIC ELECTRIC ELEMENTS

Koji Harada

Person

Patents Grantslast 30 patents

Substrate processing method

Heat treatment unit, cooling unit and cooling treatment method

Processing apparatus, processing system, distinguishing method, and...

Substrate processing apparatus and substrate processing method

Apparatus for eliminating impurities by ozone generated in space ab...

Heat treatment unit, cooling unit and cooling treatment method

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing unit

Heat and cooling treatment apparatus and substrate processing system

Treatment apparatus and treatment method

Processing solution supplying apparatus, processing apparatus and p...

Apparatus for eliminating impurities by ozone generated in space ab...

Adhesion apparatus

Washing apparatus, and washing method

Method for washing objects

Washing apparatus, and washing method

Washing apparatus, and washing method

Patents Applicationslast 30 patents

Heat treatment unit, cooling unit and cooling treatment method

Substrate processing method and substrate processing unit

Substrate processing apparatus and substrate processing method

Heat and cooling treatment apparatus and substrate processing system

Apparatus for eliminating impurities by ozone generated in space ab...