TREA

Koji Homma

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Patents Grantslast 30 patents

  • Information Patent Grant

    Wafer supporter
    • Patent number 7,237,606
    • Issue date Jul 3, 2007
    • Tokyo Electron Limited
    • Mitsuhiro Yuasa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Device and method for processing substrate
    • Patent number 6,806,211
    • Issue date Oct 19, 2004
    • Tokyo Electron Limited
    • Hiroshi Shinriki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 6,737,812
    • Issue date May 18, 2004
    • Tokyo Electron Limited
    • Mitsuhiro Yuasa
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents