Koji Ito

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Hitachinaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
System for collecting and refining SF.sub.6 gas and method therefor
- Patent number 6,004,377
- Issue date Dec 21, 1999
- Hitachi Engineering and Services Co., Ltd.
- Shin Tamata
- C01 - INORGANIC CHEMISTRY