Koji KAGAWA

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing device and etching liquid
- Patent number 12,203,021
- Issue date Jan 21, 2025
- Tokyo Electron Limited
- Koukichi Hiroshiro
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,020,943
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Atsushi Yamashita
- B08 - CLEANING
Information Patent Grant
Substrate treatment method and substrate treatment device
- Patent number 11,875,991
- Issue date Jan 16, 2024
- Tokyo Electron Limited
- Koji Kagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method, substrate processing apparatus and rec...
- Patent number 11,626,294
- Issue date Apr 11, 2023
- Tokyo Electron Limited
- Takumi Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method
- Patent number 11,551,941
- Issue date Jan 10, 2023
- Tokyo Electron Limited
- Koji Kagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 11,551,931
- Issue date Jan 10, 2023
- Tokyo Electron Limited
- Koji Kagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, substrate processing device and etchin...
- Patent number 11,306,249
- Issue date Apr 19, 2022
- Tokyo Electron Limited
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,049,723
- Issue date Jun 29, 2021
- Tokyo Electron Limited
- Koukichi Hiroshiro
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Substrate processing method, substrate processing apparatus, and su...
- Patent number 10,985,026
- Issue date Apr 20, 2021
- Tokyo Electron Limited
- Koji Kagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for substrate processing
- Patent number 10,381,233
- Issue date Aug 13, 2019
- Tokyo Electron Limited
- Koji Kagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,121,646
- Issue date Nov 6, 2018
- Tokyo Electron Limited
- Koji Kagawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,870,914
- Issue date Jan 16, 2018
- Tokyo Electron Limited
- Koji Kagawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240222157
- Publication date Jul 4, 2024
- TOKYO ELECTRON LIMITED
- Song yun Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240128307
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Rintaro HIGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230386855
- Publication date Nov 30, 2023
- TOKYO ELECTRON LIMITED
- Koji Kagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220316059
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Koukichi HIROSHIRO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220301880
- Publication date Sep 22, 2022
- TOKYO ELECTRON LIMITED
- Atsushi YAMASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND ETCHING LIQUID
- Publication number 20220213382
- Publication date Jul 7, 2022
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20220068642
- Publication date Mar 3, 2022
- TOKYO ELECTRON LIMITED
- Koji KAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210305066
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Song yun Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE
- Publication number 20210257209
- Publication date Aug 19, 2021
- TOKYO ELECTRON LIMITED
- Koji KAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20210217620
- Publication date Jul 15, 2021
- TOKYO ELECTRON LIMITED
- Koji KAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE AND ETCHIN...
- Publication number 20210032537
- Publication date Feb 4, 2021
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SUBSTRATE CLEANING METHOD
- Publication number 20200303220
- Publication date Sep 24, 2020
- TOKYO ELECTRON LIMITED
- Koji Kagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND REC...
- Publication number 20200279752
- Publication date Sep 3, 2020
- TOKYO ELECTRON LIMITED
- Takumi Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200219730
- Publication date Jul 9, 2020
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Method, Substrate Processing Apparatus, and Su...
- Publication number 20190348293
- Publication date Nov 14, 2019
- TOKYO ELECTRON LIMITED
- Koji KAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20180330971
- Publication date Nov 15, 2018
- TOKYO ELECTRON LIMITED
- Koji Kagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SUBSTRATE PROCESSING
- Publication number 20180182638
- Publication date Jun 28, 2018
- TOKYO ELECTRON LIMITED
- Koji Kagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180082831
- Publication date Mar 22, 2018
- TOKYO ELECTRON LIMITED
- Koji KAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170040154
- Publication date Feb 9, 2017
- TOKYO ELECTRON LIMITED
- Koji KAGAWA
- H01 - BASIC ELECTRIC ELEMENTS

Koji KAGAWA

Person

Patents Grantslast 30 patents

Substrate processing device and etching liquid

Substrate processing method and substrate processing apparatus

Substrate treatment method and substrate treatment device

Substrate processing method, substrate processing apparatus and rec...

Substrate cleaning method

Substrate processing apparatus, substrate processing method, and st...

Substrate processing method, substrate processing device and etchin...

Substrate processing method and substrate processing apparatus

Substrate processing method, substrate processing apparatus, and su...

Method and apparatus for substrate processing

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING DEVICE AND ETCHING LIQUID

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE AND ETCHIN...

SUBSTRATE CLEANING METHOD

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND REC...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Substrate Processing Method, Substrate Processing Apparatus, and Su...

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

METHOD AND APPARATUS FOR SUBSTRATE PROCESSING

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD