Koji KAMATA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Condensation suppressing method and processing system
- Patent number 10,961,627
- Issue date Mar 30, 2021
- Tokyo Electron Limited
- Koji Kamata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Measurement system and measurement method
- Patent number 10,186,402
- Issue date Jan 22, 2019
- Tokyo Electron Limited
- Koji Kamata
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
CONDENSATION SUPPRESSING METHOD AND PROCESSING SYSTEM
- Publication number 20190276936
- Publication date Sep 12, 2019
- TOKYO ELECTRON LIMITED
- Koji Kamata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEASUREMENT SYSTEM AND MEASUREMENT METHOD
- Publication number 20160141154
- Publication date May 19, 2016
- TOKYO ELECTRON LIMITED
- Koji KAMATA
- G01 - MEASURING TESTING