Koji Kaneyama

Person

Kyoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film processing method
- Patent number 12,119,242
- Issue date Oct 15, 2024
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate transporting method
- Patent number 12,035,576
- Issue date Jul 9, 2024
- SCREEN Holdings Co., Ltd.
- Joji Kuwahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, film formation unit, substrate proc...
- Patent number 11,986,853
- Issue date May 21, 2024
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate treating apparatus and substrate transporting method
- Patent number 11,590,540
- Issue date Feb 28, 2023
- SCREEN Holdings Co., Ltd.
- Joji Kuwahara
- B08 - CLEANING
Information Patent Grant
Substrate treating apparatus and substrate transporting method
- Patent number 11,260,429
- Issue date Mar 1, 2022
- SCREEN Holdings Co., Ltd.
- Joji Kuwahara
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,243,469
- Issue date Feb 8, 2022
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate transporting method
- Patent number 11,139,192
- Issue date Oct 5, 2021
- SCREEN Holdings Co., Ltd.
- Joji Kuwahara
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Film processing unit and substrate processing apparatus
- Patent number 11,004,702
- Issue date May 11, 2021
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure device, substrate processing apparatus, exposure method an...
- Patent number 10,955,745
- Issue date Mar 23, 2021
- SCREEN Holdings Co., Ltd.
- Chisayo Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Development unit, substrate processing apparatus, development metho...
- Patent number 10,754,251
- Issue date Aug 25, 2020
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing method
- Patent number 10,684,548
- Issue date Jun 16, 2020
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,591,820
- Issue date Mar 17, 2020
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method
- Patent number 10,539,877
- Issue date Jan 21, 2020
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching device, substrate processing apparatus, etching method and...
- Patent number 10,395,942
- Issue date Aug 27, 2019
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,331,034
- Issue date Jun 25, 2019
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method
- Patent number 10,185,219
- Issue date Jan 22, 2019
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,047,441
- Issue date Aug 14, 2018
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Negative developing method and negative developing apparatus
- Patent number 10,042,262
- Issue date Aug 7, 2018
- SCREEN Holdings Co., Ltd.
- Tadashi Miyagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,828,676
- Issue date Nov 28, 2017
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method
- Patent number 9,477,162
- Issue date Oct 25, 2016
- Screen Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,375,748
- Issue date Jun 28, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of and apparatus for heat-treating exposed substrate
- Patent number 9,064,914
- Issue date Jun 23, 2015
- SCREEN Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus
- Patent number 8,932,672
- Issue date Jan 13, 2015
- Screen Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G11 - INFORMATION STORAGE
Information Patent Grant
Substrate processing method
- Patent number 8,851,769
- Issue date Oct 7, 2014
- Sokudo Co., Ltd.
- Koji Kaneyama
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,635,968
- Issue date Jan 28, 2014
- Sokudo Co., Ltd.
- Koji Kaneyama
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,585,830
- Issue date Nov 19, 2013
- Sokudo Co., Ltd.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method
- Patent number 8,540,824
- Issue date Sep 24, 2013
- Sokudo Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,496,761
- Issue date Jul 30, 2013
- Sokudo Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method
- Patent number 8,356,424
- Issue date Jan 22, 2013
- Dainippon Screen Mfg. Co., Ltd.
- Koji Kaneyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,040,488
- Issue date Oct 18, 2011
- Sokudo Co., Ltd.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20240373683
- Publication date Nov 7, 2024
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20240334758
- Publication date Oct 3, 2024
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20240334759
- Publication date Oct 3, 2024
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240253079
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20230166301
- Publication date Jun 1, 2023
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20220134389
- Publication date May 5, 2022
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- B08 - CLEANING
Information Patent Application
FILM PROCESSING METHOD
- Publication number 20210233784
- Publication date Jul 29, 2021
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20210159293
- Publication date May 27, 2021
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROC...
- Publication number 20210078036
- Publication date Mar 18, 2021
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20200211882
- Publication date Jul 2, 2020
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20200206788
- Publication date Jul 2, 2020
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- B08 - CLEANING
Information Patent Application
DEVELOPING METHOD
- Publication number 20190294049
- Publication date Sep 26, 2019
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190196335
- Publication date Jun 27, 2019
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING METHOD
- Publication number 20190107780
- Publication date Apr 11, 2019
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD AN...
- Publication number 20190086808
- Publication date Mar 21, 2019
- SCREEN Holdings Co., Ltd.
- Chisayo NAKAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190041754
- Publication date Feb 7, 2019
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPMENT UNIT, SUBSTRATE PROCESSING APPARATUS, DEVELOPMENT METHO...
- Publication number 20190041755
- Publication date Feb 7, 2019
- Yuji TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190004427
- Publication date Jan 3, 2019
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FILM PROCESSING UNIT, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE...
- Publication number 20180315623
- Publication date Nov 1, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FILM PROCESSING UNIT AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180315625
- Publication date Nov 1, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROC...
- Publication number 20180147599
- Publication date May 31, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING DEVICE, SUBSTRATE PROCESSING APPARATUS, ETCHING METHOD AND...
- Publication number 20180076056
- Publication date Mar 15, 2018
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING DEVICE, SUBSTRATE PROCESSING APPARATUS, THERMAL...
- Publication number 20180050368
- Publication date Feb 22, 2018
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180044795
- Publication date Feb 15, 2018
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko HARUMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160289839
- Publication date Oct 6, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko HARUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NEGATIVE DEVELOPING METHOD AND NEGATIVE DEVELOPING APPARATUS
- Publication number 20160282722
- Publication date Sep 29, 2016
- SCREEN Holdings Co., Ltd.
- Tadashi MIYAGI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING METHOD
- Publication number 20160195811
- Publication date Jul 7, 2016
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20150086923
- Publication date Mar 26, 2015
- SCREEN Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140120477
- Publication date May 1, 2014
- Sokudo Co., Ltd.
- Shuichi Yasuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20140104586
- Publication date Apr 17, 2014
- Koji KANEYAMA
- H01 - BASIC ELECTRIC ELEMENTS

Koji Kaneyama

Person

Patents Grantslast 30 patents

Film processing method

Substrate treating apparatus and substrate transporting method

Substrate processing apparatus, film formation unit, substrate proc...

Substrate treating apparatus and substrate transporting method

Substrate treating apparatus and substrate transporting method

Substrate processing apparatus and substrate processing method

Substrate treating apparatus and substrate transporting method

Film processing unit and substrate processing apparatus

Exposure device, substrate processing apparatus, exposure method an...

Development unit, substrate processing apparatus, development metho...

Developing method

Substrate processing apparatus and substrate processing method

Developing method

Etching device, substrate processing apparatus, etching method and...

Substrate processing apparatus and substrate processing method

Developing method

Substrate processing apparatus and substrate processing method

Negative developing method and negative developing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing method

Substrate processing apparatus and substrate processing method

Method of and apparatus for heat-treating exposed substrate

Substrate processing apparatus

Substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing method

Substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

FILM PROCESSING METHOD

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROC...

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

DEVELOPING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DEVELOPING METHOD

EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD AN...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DEVELOPMENT UNIT, SUBSTRATE PROCESSING APPARATUS, DEVELOPMENT METHO...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

FILM PROCESSING UNIT, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE...

FILM PROCESSING UNIT AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROC...

ETCHING DEVICE, SUBSTRATE PROCESSING APPARATUS, ETCHING METHOD AND...

THERMAL PROCESSING DEVICE, SUBSTRATE PROCESSING APPARATUS, THERMAL...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

NEGATIVE DEVELOPING METHOD AND NEGATIVE DEVELOPING APPARATUS

DEVELOPING METHOD

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD