Koji Kawamura

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and electrode consumption amount measur...
- Patent number 11,508,555
- Issue date Nov 22, 2022
- Tokyo Electron Limited
- Koji Kawamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,501,976
- Issue date Nov 15, 2022
- Tokyo Electron Limited
- Seiichi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210265170
- Publication date Aug 26, 2021
- TOKYO ELECTRON LIMITED
- Seiichi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND ELECTRODE CONSUMPTION AMOUNT MEASUR...
- Publication number 20210166916
- Publication date Jun 3, 2021
- TOKYO ELECTRON LIMITED
- Koji Kawamura
- H01 - BASIC ELECTRIC ELEMENTS