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Koji Koizumi
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Yamanashi-ken, JP
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last 30 patents
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Patent Grant
Ion flow forming method and apparatus
Patent number
6,435,131
Issue date
Aug 20, 2002
Tokyo Electron Limited
Koji Koizumi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ion flow forming method and apparatus
Patent number
6,136,387
Issue date
Oct 24, 2000
Tokyo Electron Limited
Koji Koizumi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetron sputtering apparatus and sputtering gun for use in the same
Patent number
5,334,302
Issue date
Aug 2, 1994
Tokyo Electron Limited
Kenichi Kubo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...