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Koji Kotani

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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20230238217
    • Publication date Jul 27, 2023
    • TOKYO ELECTRON LIMITED
    • Koji KOTANI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MICROWAVE PLASMA SOURCE AND MICROWAVE PLASMA PROCESSING APPARATUS
    • Publication number 20180127880
    • Publication date May 10, 2018
    • TOKYO ELECTRON LIMITED
    • Koji Kotani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA FILM-FORMING APPARATUS AND SUBSTRATE PEDESTAL
    • Publication number 20170369996
    • Publication date Dec 28, 2017
    • TOKYO ELECTRON LIMITED
    • Masashi Imanaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESSING METHOD
    • Publication number 20130126001
    • Publication date May 23, 2013
    • TOKYO ELECTRON LIMITED
    • Toshihisa Nozawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Processing Apparatus and Processing Method
    • Publication number 20090053900
    • Publication date Feb 26, 2009
    • Tokyo Electron Limited
    • Toshihisa Nozawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Semiconductor Integrated Circuit Switch Matrix
    • Publication number 20080318370
    • Publication date Dec 25, 2008
    • Advantest Corporation
    • Tadahiro Ohmi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Temperature Controlling Method for Substrate Processing System and...
    • Publication number 20080271471
    • Publication date Nov 6, 2008
    • Toshihisa Nozawa
    • F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
  • Information Patent Application

    Plasma Processing Apparatus
    • Publication number 20080236489
    • Publication date Oct 2, 2008
    • TOKYO ELECTRON LIMITED
    • Koji Kotani
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Substrate Processing Apparatus and Temperature Control Device
    • Publication number 20070272155
    • Publication date Nov 29, 2007
    • Toshihisa Nozawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate processing apparatus
    • Publication number 20070163502
    • Publication date Jul 19, 2007
    • Toshihisa Nozawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20070137575
    • Publication date Jun 21, 2007
    • Tokyo Electron Limited
    • Tadahiro Ohmi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Complementary MIS device
    • Publication number 20070096175
    • Publication date May 3, 2007
    • Tadahiro OHMI
    • Tadahiro Ohmi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Data analysis device and data recognition device
    • Publication number 20060088212
    • Publication date Apr 27, 2006
    • Tadahiro OHMI
    • Tadahiro Ohmi
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    Semiconductor integrated circuit
    • Publication number 20060017071
    • Publication date Jan 26, 2006
    • Tadahiro Ohmi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Semiconductor integrated circuit and manufacturing method of the same
    • Publication number 20060017101
    • Publication date Jan 26, 2006
    • Tadahiro Ohmi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Data processing device
    • Publication number 20050105816
    • Publication date May 19, 2005
    • Tadahiro Ohmi
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    Semiconductor circuit for arithmetic processing and arithmetic proc...
    • Publication number 20050080835
    • Publication date Apr 14, 2005
    • Tadahiro Ohmi, Kabushiki Kaisha Ultraclean Technology Research Institute
    • Tadahiro Ohmi
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    Complementary mis device
    • Publication number 20040245579
    • Publication date Dec 9, 2004
    • Tadahiro Ohmi
    • H01 - BASIC ELECTRIC ELEMENTS