Koji Koyama

Person

Kurokawa-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 11,569,068
- Issue date Jan 31, 2023
- Tokyo Electron Limited
- Kazushi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,217,430
- Issue date Jan 4, 2022
- Tokyo Electron Limited
- Masaki Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Antenna device, radiation method of electromagnetic waves, plasma p...
- Patent number 10,896,811
- Issue date Jan 19, 2021
- Tokyo Electron Limited
- Ayako Ito
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma processing apparatus
- Patent number 10,879,045
- Issue date Dec 29, 2020
- Tokyo Electron Limited
- Kazushi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Antenna, plasma processing device and plasma processing method
- Patent number 10,832,892
- Issue date Nov 10, 2020
- Tokyo Electron Limited
- Kazuki Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Antenna and plasma processing apparatus
- Patent number 10,825,658
- Issue date Nov 3, 2020
- Tokyo Electron Limited
- Yuki Kawada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 10,622,197
- Issue date Apr 14, 2020
- Tokyo Electron Limited
- Shinji Kubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Antenna device and plasma processing apparatus
- Patent number 10,553,402
- Issue date Feb 4, 2020
- Tokyo Electron Limited
- Yuki Kawada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,504,698
- Issue date Dec 10, 2019
- Tokyo Electron Limited
- Masayuki Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Antenna and plasma processing apparatus
- Patent number 10,083,819
- Issue date Sep 25, 2018
- Tokyo Electron Limited
- Naoki Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus, plasma processing method and high freq...
- Patent number 9,418,822
- Issue date Aug 16, 2016
- Tokyo Electron Limited
- Kazushi Kaneko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Dielectric window for plasma treatment device, and plasma treatment...
- Patent number 9,048,070
- Issue date Jun 2, 2015
- Tokyo Electron Limited
- Caizhong Tian
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20200135430
- Publication date Apr 30, 2020
- TOKYO ELECTRON LIMITED
- Masaki INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNA DEVICE, RADIATION METHOD OF ELECTROMAGNETIC WAVES, PLASMA P...
- Publication number 20200075292
- Publication date Mar 5, 2020
- TOKYO ELECTRON LIMITED
- Ayako ITO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ANTENNA, PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
- Publication number 20200058468
- Publication date Feb 20, 2020
- TOKYO ELECTRON LIMITED
- Kazuki TAKAHASHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ANTENNA DEVICE AND PLASMA PROCESSING APPARATUS
- Publication number 20190333736
- Publication date Oct 31, 2019
- TOKYO ELECTRON LIMITED
- Yuki KAWADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNA DEVICE AND PLASMA PROCESSING APPARATUS
- Publication number 20190279845
- Publication date Sep 12, 2019
- TOKYO ELECTRON LIMITED
- Naoki MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNA AND PLASMA PROCESSING APPARATUS
- Publication number 20180374678
- Publication date Dec 27, 2018
- TOKYO ELECTRON LIMITED
- Yuki KAWADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20180211818
- Publication date Jul 26, 2018
- TOKYO ELECTRON LIMITED
- Shinji Kubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20180151332
- Publication date May 31, 2018
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20170103874
- Publication date Apr 13, 2017
- TOKYO ELECTRON LIMITED
- Kazushi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20160118224
- Publication date Apr 28, 2016
- TOKYO ELECTRON LIMITED
- Masayuki KOHNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNA AND PLASMA PROCESSING APPARATUS
- Publication number 20150206712
- Publication date Jul 23, 2015
- TOKYO ELECTRON LIMITED
- Naoki MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRIC WINDOW, ANTENNA AND PLASMA PROCESSING APPARATUS
- Publication number 20150155139
- Publication date Jun 4, 2015
- TOKYO ELECTRON LIMITED
- Jun YOSHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20150096882
- Publication date Apr 9, 2015
- TOKYO ELECTRON LIMITED
- Naoki Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRIC WINDOW FOR PLASMA TREATMENT DEVICE, AND PLASMA TREATMENT...
- Publication number 20140312767
- Publication date Oct 23, 2014
- TOKYO ELECTRON LIMITED
- Caizhong Tian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND HIGH FREQ...
- Publication number 20140225504
- Publication date Aug 14, 2014
- TOKYO ELECTRON LIMITED
- Kazushi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS

Koji Koyama

Person

Patents Grantslast 30 patents

Plasma processing apparatus

Plasma processing apparatus and plasma processing method

Antenna device, radiation method of electromagnetic waves, plasma p...

Plasma processing apparatus

Antenna, plasma processing device and plasma processing method

Antenna and plasma processing apparatus

Plasma processing apparatus and plasma processing method

Antenna device and plasma processing apparatus

Plasma processing apparatus

Antenna and plasma processing apparatus

Plasma processing apparatus, plasma processing method and high freq...

Dielectric window for plasma treatment device, and plasma treatment...

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

ANTENNA DEVICE, RADIATION METHOD OF ELECTROMAGNETIC WAVES, PLASMA P...

ANTENNA, PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD

ANTENNA DEVICE AND PLASMA PROCESSING APPARATUS

ANTENNA DEVICE AND PLASMA PROCESSING APPARATUS

ANTENNA AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

ANTENNA AND PLASMA PROCESSING APPARATUS

DIELECTRIC WINDOW, ANTENNA AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

DIELECTRIC WINDOW FOR PLASMA TREATMENT DEVICE, AND PLASMA TREATMENT...

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND HIGH FREQ...