Koji Kuga

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Fukuoka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Gas shower plate for plasma processing apparatus
- Patent number 8,757,090
- Issue date Jun 24, 2014
- Panasonic Corporation
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Gas Shower Plate for Palsma Processing Apparatus
- Publication number 20090145359
- Publication date Jun 11, 2009
- PANASONIC CORPORATION
- Kiyoshi Arita
- H01 - BASIC ELECTRIC ELEMENTS