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Koji Maeda

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  • Nirasaki City, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Film forming apparatus and film forming method
    • Patent number 12,163,215
    • Issue date Dec 10, 2024
    • Tokyo Electron Limited
    • Koji Maeda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus and method
    • Patent number 11,532,784
    • Issue date Dec 20, 2022
    • Tokyo Electron Limited
    • Manabu Nakagawasai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Stage device and processing apparatus
    • Patent number 11,417,504
    • Issue date Aug 16, 2022
    • Tokyo Electron Limited
    • Manabu Nakagawasai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate transfer apparatus and substrate transfer method
    • Patent number 11,309,199
    • Issue date Apr 19, 2022
    • Tokyo Electron Limited
    • Keita Horiuchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Stage device and processing apparatus
    • Patent number 11,251,027
    • Issue date Feb 15, 2022
    • Tokyo Electron Limited
    • Tatsuo Hatano
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    PVD processing method and PVD processing apparatus
    • Patent number 11,193,200
    • Issue date Dec 7, 2021
    • Tokyo Electron Limited
    • Koji Maeda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 10,468,237
    • Issue date Nov 5, 2019
    • Tokyo Electron Limited
    • Atsushi Gomi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 10,049,860
    • Issue date Aug 14, 2018
    • Tokyo Electron Limited
    • Atsushi Gomi
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20220336194
    • Publication date Oct 20, 2022
    • TOKYO ELECTRON LIMITED
    • Hiroyuki YOKOHARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
    • Publication number 20220319819
    • Publication date Oct 6, 2022
    • TOKYO ELECTRON LIMITED
    • Koji MAEDA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS AND FILM FORMING METHOD
    • Publication number 20220178014
    • Publication date Jun 9, 2022
    • TOKYO ELECTRON LIMITED
    • Koji MAEDA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND METHOD
    • Publication number 20210280777
    • Publication date Sep 9, 2021
    • TOKYO ELECTRON LIMITED
    • Manabu NAKAGAWASAI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
    • Publication number 20210005486
    • Publication date Jan 7, 2021
    • TOKYO ELECTRON LIMITED
    • Keita HORIUCHI
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    STAGE DEVICE AND PROCESSING APPARATUS
    • Publication number 20200373133
    • Publication date Nov 26, 2020
    • TOKYO ELECTRON LIMITED
    • Tatsuo HATANO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    STAGE DEVICE AND PROCESSING APPARATUS
    • Publication number 20200135434
    • Publication date Apr 30, 2020
    • TOKYO ELECTRON LIMITED
    • Manabu NAKAGAWASAI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PVD PROCESSING METHOD AND PVD PROCESSING APPARATUS
    • Publication number 20190169737
    • Publication date Jun 6, 2019
    • TOKYO ELECTRON LIMITED
    • Koji Maeda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20180315585
    • Publication date Nov 1, 2018
    • TOKYO ELECTRON LIMITED
    • Atsushi Gomi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20150235815
    • Publication date Aug 20, 2015
    • TOKYO ELECTRON LIMITED
    • Atsushi Gomi
    • H01 - BASIC ELECTRIC ELEMENTS