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Reticle and pattern formation method
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Patent number 5,998,068
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Issue date Dec 7, 1999
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Matsushita Electric Industrial Co., Ltd.
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Koji Matsuoka
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Photo mask and pattern forming method
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Patent number 5,994,002
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Issue date Nov 30, 1999
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Matsushita Electric Industrial Co., Ltd.
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Koji Matsuoka
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Pattern formation method
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Patent number 5,866,302
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Issue date Feb 2, 1999
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Matsushita Electric Industrial Co., Ltd.
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Koji Matsuoka
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY