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Patents Grants
last 30 patents
Information
Patent Grant
Exposure apparatus, exposure method, and method of manufacturing ar...
Patent number
11,474,439
Issue date
Oct 18, 2022
Canon Kabushiki Kaisha
Kouki Miyano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and article manufacturing method
Patent number
11,061,337
Issue date
Jul 13, 2021
Canon Kabushiki Kaisha
Koji Mikami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern generation method
Patent number
9,672,300
Issue date
Jun 6, 2017
Canon Kabushiki Kaisha
Koji Mikami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Determination method, storage medium and information processing app...
Patent number
9,551,926
Issue date
Jan 24, 2017
Canon Kabushiki Kaisha
Yuichi Gyoda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for evaluating optical image of pattern, recording medium, a...
Patent number
9,547,230
Issue date
Jan 17, 2017
Canon Kabushiki Kaisha
Koji Mikami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist pattern calculation method and calculation program storage m...
Patent number
9,448,495
Issue date
Sep 20, 2016
Canon Kabushiki Kaisha
Ryo Nakayama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Storage medium storing computer program for determining at least on...
Patent number
9,036,897
Issue date
May 19, 2015
Canon Kabushiki Kaisha
Hiroyuki Ishii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of determining mask pattern and exposure condition, storage...
Patent number
8,958,059
Issue date
Feb 17, 2015
Canon Kabushiki Kaisha
Koji Mikami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern determining method, pattern determining apparatus and stora...
Patent number
8,839,169
Issue date
Sep 16, 2014
Canon Kabushiki Kaisha
Yuichi Gyoda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method, apparatus and medium for determining the intensity distribu...
Patent number
8,811,714
Issue date
Aug 19, 2014
Canon Kabushiki Kaisha
Yuichi Gyoda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Effective light source shape database generation method, optical im...
Patent number
8,582,083
Issue date
Nov 12, 2013
Canon Kabushiki Kaisha
Hiroto Yoshii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Recording medium storing program for determining exposure parameter...
Patent number
8,334,968
Issue date
Dec 18, 2012
Canon Kabushiki Kaisha
Kouichirou Tsujita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of transferring pattern of reticle, computer readable storag...
Patent number
8,049,191
Issue date
Nov 1, 2011
Canon Kabushiki Kaisha
Kouichirou Tsujita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method and memory medium storing computer program
Patent number
8,029,954
Issue date
Oct 4, 2011
Canon Kabushiki Kaisha
Koji Mikami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, setting method, and exposure method having the...
Patent number
7,864,296
Issue date
Jan 4, 2011
Canon Kabushiki Kaisha
Kazuhiro Takahashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and program for calculating exposure dose and focus position...
Patent number
7,771,905
Issue date
Aug 10, 2010
Canon Kabushiki Kaisha
Koichi Sentoku
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Parameter determination method, exposure method, device fabrication...
Patent number
7,642,022
Issue date
Jan 5, 2010
Canon Kabushiki Kaisha
Hiroto Yoshii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus and device manufacturing method
Patent number
6,014,455
Issue date
Jan 11, 2000
Canon Kabushiki Kaisha
Yuhei Sumiyoshi
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...
Publication number
20200409276
Publication date
Dec 31, 2020
Canon Kabushiki Kaisha
Kouki Miyano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD
Publication number
20200292945
Publication date
Sep 17, 2020
Canon Kabushiki Kaisha
Koji Mikami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR EVALUATING OPTICAL IMAGE OF PATTERN, RECORDING MEDIUM, A...
Publication number
20150177609
Publication date
Jun 25, 2015
Canon Kabushiki Kaisha
Koji Mikami
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD OF DETERMINING MASK PATTERN AND EXPOSURE CONDITION, STORAGE...
Publication number
20140146311
Publication date
May 29, 2014
Canon Kabushiki Kaisha
Koji Mikami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERN GENERATION METHOD
Publication number
20130329202
Publication date
Dec 12, 2013
Koji Mikami
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PATTERN DETERMINING METHOD, PATTERN DETERMINING APPARATUS AND STORA...
Publication number
20130149636
Publication date
Jun 13, 2013
Canon Kabushiki Kaisha
Yuichi Gyoda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DETERMINATION METHOD, STORAGE MEDIUM AND INFORMATION PROCESSING APP...
Publication number
20130010272
Publication date
Jan 10, 2013
Canon Kabushiki Kaisha
Yuichi Gyoda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST PATTERN CALCULATION METHOD AND CALCULATION PROGRAM STORAGE M...
Publication number
20120092639
Publication date
Apr 19, 2012
Canon Kabushiki Kaisha
Ryo Nakayama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DETERMINATION METHOD, EXPOSURE METHOD, AND STORAGE MEDIUM
Publication number
20120051622
Publication date
Mar 1, 2012
Canon Kabushiki Kaisha
Yuichi GYODA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DECISION METHOD AND STORAGE MEDIUM
Publication number
20120033194
Publication date
Feb 9, 2012
Canon Kabushiki Kaisha
Koji Mikami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
STORAGE MEDIUM STORING COMPUTER PROGRAM FOR DETERMINING AT LEAST ON...
Publication number
20110206270
Publication date
Aug 25, 2011
Canon Kabushiki Kaisha
Hiroyuki Ishii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF TRANSFERRING PATTERN OF RETICLE, COMPUTER READABLE STORAG...
Publication number
20100102255
Publication date
Apr 29, 2010
Canon Kabushiki Kaisha
Kouichirou Tsujita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE METHOD AND MEMORY MEDIUM STORING COMPUTER PROGRAM
Publication number
20100009275
Publication date
Jan 14, 2010
Canon Kabushiki Kaisha
Koji Mikami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RECORDING MEDIUM STORING PROGRAM FOR DETERMINING EXPOSURE PARAMETER...
Publication number
20090310116
Publication date
Dec 17, 2009
Canon Kabushiki Kaisha
Kouichirou Tsujita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EFFECTIVE LIGHT SOURCE SHAPE DATABASE GENERATION METHOD, OPTICAL IM...
Publication number
20090231562
Publication date
Sep 17, 2009
Canon Kabushiki Kaisha
Hiroto Yoshii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PARAMETER DETERMINATION METHOD, EXPOSURE METHOD, DEVICE FABRICATION...
Publication number
20090233194
Publication date
Sep 17, 2009
Canon Kabushiki Kaisha
Hiroto Yoshii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND PROGRAM FOR CALCULATING EXPOSURE DOSE AND FOCUS POSITION...
Publication number
20070154824
Publication date
Jul 5, 2007
Koichi Sentoku
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS AND METHOD
Publication number
20070046921
Publication date
Mar 1, 2007
Kazuhiro Takahashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY