Koji MITSUHASHI

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Component for use in plasma processing apparatus, plasma processing...
- Patent number 11,473,182
- Issue date Oct 18, 2022
- Tokyo Electron Limited
- Koji Mitsuhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Component for use in plasma processing apparatus, plasma processing...
- Patent number 10,808,309
- Issue date Oct 20, 2020
- Tokyo Electron Limited
- Koji Mitsuhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Component of substrate processing apparatus and method for forming...
- Patent number 9,828,690
- Issue date Nov 28, 2017
- Tokyo Electron Limited
- Koji Mitsuhashi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Component of substrate processing apparatus and method for forming...
- Patent number 8,999,475
- Issue date Apr 7, 2015
- Tokyo Electron Limited
- Koji Mitsuhashi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Patents Applicationslast 30 patents

Information Patent Application
COMPONENT FOR USE IN PLASMA PROCESSING APPARATUS, PLASMA PROCESSING...
- Publication number 20210002754
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Koji MITSUHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD FOR COMPONENT IN PLASMA PROCESSING APPARATUS
- Publication number 20170233860
- Publication date Aug 17, 2017
- TOKYO ELECTRON LIMITED
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENT FOR PLASMA PROCESSING APPARATUS, AND MANUFACTURING METHOD...
- Publication number 20160076129
- Publication date Mar 17, 2016
- TOKYO ELECTRON LIMITED
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENT FOR USE IN PLASMA PROCESSING APPARATUS, PLASMA PROCESSING...
- Publication number 20160010200
- Publication date Jan 14, 2016
- TOKYO ELECTRON LIMITED
- Koji MITSUHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENT OF SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FORMING...
- Publication number 20150203981
- Publication date Jul 23, 2015
- TOKYO ELECTRON LIMITED
- Koji MITSUHASHI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
COMPONENT OF SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FORMING...
- Publication number 20090186184
- Publication date Jul 23, 2009
- TOKYO ELECTRON LIMITED
- Koji Mitsuhashi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Koji MITSUHASHI

Person

Patents Grantslast 30 patents

Component for use in plasma processing apparatus, plasma processing...

Component for use in plasma processing apparatus, plasma processing...

Component of substrate processing apparatus and method for forming...

Component of substrate processing apparatus and method for forming...

Patents Applicationslast 30 patents

COMPONENT FOR USE IN PLASMA PROCESSING APPARATUS, PLASMA PROCESSING...

MANUFACTURING METHOD FOR COMPONENT IN PLASMA PROCESSING APPARATUS

COMPONENT FOR PLASMA PROCESSING APPARATUS, AND MANUFACTURING METHOD...

COMPONENT FOR USE IN PLASMA PROCESSING APPARATUS, PLASMA PROCESSING...

COMPONENT OF SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FORMING...

COMPONENT OF SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FORMING...