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Koji Miyazaki
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Kanagawa, JP
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Patents Grants
last 30 patents
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Patent Grant
Focus control method for an optical apparatus which inspects a phot...
Patent number
7,692,128
Issue date
Apr 6, 2010
Lasertec Corporation
Hideo Takizawa
G01 - MEASURING TESTING
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Patent Grant
Phase shift amount measurement apparatus and transmittance measurem...
Patent number
7,643,157
Issue date
Jan 5, 2010
Lasertec Corporation
Hideo Takizawa
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Phase shift amount measurement apparatus and transmittance measurem...
Publication number
20080174786
Publication date
Jul 24, 2008
Hideo Takizawa
G01 - MEASURING TESTING
Information
Patent Application
Focus control method
Publication number
20080142681
Publication date
Jun 19, 2008
Hideo Takizawa
G02 - OPTICS