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Koji Morita
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Nishi-shirakawa-gun, JP
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last 30 patents
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Patent Grant
Polishing pad, method and apparatus for treating polishing pad and...
Patent number
6,190,238
Issue date
Feb 20, 2001
Shin-Etsu Handotai Co., Ltd.
Koichi Tanaka
B24 - GRINDING POLISHING
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Patent Grant
Method for polishing thin plate and apparatus for polishing
Patent number
5,934,981
Issue date
Aug 10, 1999
Shin-Etsu Handotai Co., Ltd.
Koichi Tanaka
B24 - GRINDING POLISHING
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Patent Grant
Polishing system
Patent number
5,797,789
Issue date
Aug 25, 1998
Shin-Etsu Handotai Co., Ltd.
Koichi Tanaka
B24 - GRINDING POLISHING