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Koji Nishida
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Otake, JP
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last 30 patents
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Patent Grant
Copolymer, process for producing the same, and resist composition
Patent number
6,706,826
Issue date
Mar 16, 2004
Mitsubishi Rayon Co., Ltd.
Tadayuki Fujiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY