Koji NONOBE

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Scheduler, substrate processing apparatus, and substrate conveyance...
- Patent number 11,099,546
- Issue date Aug 24, 2021
- Ebara Corporation
- Koji Nonobe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scheduler, substrate processing apparatus, and substrate conveyance...
- Patent number 10,824,135
- Issue date Nov 3, 2020
- Ebara Corporation
- Koji Nonobe
- G05 - CONTROLLING REGULATING
Information Patent Grant
Scheduler, substrate processing apparatus, and substrate conveyance...
- Patent number 10,824,138
- Issue date Nov 3, 2020
- Ebara Corporation
- Koji Nonobe
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SCHEDULER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE CONVEYANCE...
- Publication number 20210011462
- Publication date Jan 14, 2021
- EBARA CORPORATION
- Koji Nonobe
- G05 - CONTROLLING REGULATING
Information Patent Application
SCHEDULER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE CONVEYANCE...
- Publication number 20190271970
- Publication date Sep 5, 2019
- EBARA CORPORATION
- Koji NONOBE
- G05 - CONTROLLING REGULATING
Information Patent Application
SCHEDULER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE CONVEYANCE...
- Publication number 20180203434
- Publication date Jul 19, 2018
- EBARA CORPORATION
- Koji NONOBE
- G05 - CONTROLLING REGULATING