Koji Ogura

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,033,872
- Issue date Jul 9, 2024
- Tokyo Electron Limited
- Keita Hirase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,424,141
- Issue date Aug 23, 2022
- Tokyo Electron Limited
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210366740
- Publication date Nov 25, 2021
- TOKYO ELECTRON LIMITED
- Keita HIRASE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STORAGE DEVICE AND STORAGE METHOD
- Publication number 20210368586
- Publication date Nov 25, 2021
- TOKYO ELECTRON LIMITED
- Koji OGURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20190122906
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS