Koji Shibata

Person

Souraku-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and manufacturing method for a semic...
- Patent number 9,111,972
- Issue date Aug 18, 2015
- Hitachi Kokusai Electric Inc.
- Mitsunori Takeshita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and attaching/detaching method of re...
- Patent number 8,172,947
- Issue date May 8, 2012
- Hitachi Kokusai Electric Inc.
- Koji Shibata
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of cleaning CVD device and cleaning device therefor
- Patent number 6,935,351
- Issue date Aug 30, 2005
- Anelva Corporation
- Koji Shibata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20160093476
- Publication date Mar 31, 2016
- Hitachi Kokusai Electric Inc.
- Kazuyuki TOYODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...
- Publication number 20120051873
- Publication date Mar 1, 2012
- Hitachi Kokusai Electric Inc.
- Koji SHIBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20110286819
- Publication date Nov 24, 2011
- Hitachi Kokusai Electric Inc.
- Koji SHIBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus and Manufacturing Method for a Semic...
- Publication number 20080236488
- Publication date Oct 2, 2008
- Mitsunori Takeshita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and attaching/detaching method of re...
- Publication number 20080083109
- Publication date Apr 10, 2008
- Hitachi Kokusai Electric Inc.
- Koji SHIBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of cleaning cvd device and cleaning device therefor
- Publication number 20030079757
- Publication date May 1, 2003
- Koji Shibata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Koji Shibata

Person

Patents Grantslast 30 patents

Substrate processing apparatus and manufacturing method for a semic...

Substrate processing apparatus and attaching/detaching method of re...

Method of cleaning CVD device and cleaning device therefor

Patents Applicationslast 30 patents

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Substrate Processing Apparatus and Manufacturing Method for a Semic...

Substrate processing apparatus and attaching/detaching method of re...

Method of cleaning cvd device and cleaning device therefor