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Yamanashi, JP
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last 30 patents
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Patent Grant
Method and system for modifying a gate dielectric stack containing...
Patent number
7,163,877
Issue date
Jan 16, 2007
Tokyo Electron Limited
Hiroaki Niimi
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method and system for modifying a gate dielectric stack containing...
Publication number
20060040483
Publication date
Feb 23, 2006
TOKYO ELECTRON LIMITED
Hiroaki Niimi
H01 - BASIC ELECTRIC ELEMENTS