Koji TAKAYANAGI

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Solution treatment apparatus and cleaning method
- Patent number 11,868,057
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Kenta Shibasaki
- B08 - CLEANING
Information Patent Grant
Nozzle standby device, liquid processing apparatus and operation me...
- Patent number 11,862,485
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Satoshi Shimmura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing liquid supplying apparatus and processing liquid supplyi...
- Patent number 11,342,198
- Issue date May 24, 2022
- Tokyo Electron Limited
- Yuichi Terashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,273,464
- Issue date Mar 15, 2022
- Tokyo Electron Limited
- Satoshi Shimmura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coated film removing apparatus
- Patent number 11,062,899
- Issue date Jul 13, 2021
- Tokyo Electron Limited
- Takafumi Hasimoto
- B08 - CLEANING
Information Patent Grant
Filter unit pretreatment method, treatment liquid supply apparatus,...
- Patent number 10,974,181
- Issue date Apr 13, 2021
- Tokyo Electron Limited
- Yuichi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus and coating and developing method
- Patent number 10,838,311
- Issue date Nov 17, 2020
- Tokyo Electron Limited
- Keigo Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 10,734,251
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Koji Takayanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Filter unit pretreatment method, treatment liquid supply apparatus,...
- Patent number 10,493,387
- Issue date Dec 3, 2019
- Tokyo Electron Limited
- Yuichi Yoshida
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Processing liquid supplying apparatus and method of supplying proce...
- Patent number 10,268,116
- Issue date Apr 23, 2019
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing liquid supplying apparatus and processing liquid supplyi...
- Patent number 10,074,546
- Issue date Sep 11, 2018
- Tokyo Electron Limited
- Yuichi Terashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating treatment method with airflow control, and non-transitory r...
- Patent number 9,947,534
- Issue date Apr 17, 2018
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing liquid supplying apparatus and method of supplying proce...
- Patent number 9,846,363
- Issue date Dec 19, 2017
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing-liquid supply apparatus and processing-liquid supply method
- Patent number 9,732,910
- Issue date Aug 15, 2017
- Tokyo Electron Limited
- Koji Takayanagi
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Process liquid supply apparatus operating method, process liquid su...
- Patent number 9,576,829
- Issue date Feb 21, 2017
- Tokyo Electron Limited
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process liquid supply apparatus operating method, process liquid su...
- Patent number 9,508,574
- Issue date Nov 29, 2016
- Tokyo Electron Limited
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and development treatment system with airflow control inclu...
- Patent number 9,162,247
- Issue date Oct 20, 2015
- Tokyo Electron Limited
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating treatment method
- Patent number 9,165,763
- Issue date Oct 20, 2015
- Tokyo Electron Limited
- Katsunori Ichino
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating treatment method, coating treatment apparatus, and computer...
- Patent number 8,851,011
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating treatment method, computer storage medium, and coating trea...
- Patent number 8,501,274
- Issue date Aug 6, 2013
- Tokyo Electron Limited
- Katsunori Ichino
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating treatment method, coating treatment apparatus, and computer...
- Patent number 8,414,972
- Issue date Apr 9, 2013
- Tokyo Electron Limited
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Solution treatment apparatus, solution treatment method and resist...
- Patent number 8,375,887
- Issue date Feb 19, 2013
- Tokyo Electron Limited
- Koji Takayanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating treatment method, coating treatment apparatus, and computer...
- Patent number 8,318,247
- Issue date Nov 27, 2012
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating method
- Patent number 8,304,018
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Koji Takayanagi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coater cup
- Patent number D610176
- Issue date Feb 16, 2010
- Tokyo Electron Limited
- Shuichi Nagamine
- D15 - Machines not elsewhere specified

Patents Applicationslast 30 patents

Information Patent Application
CLEANING JIG, COATING APPARATUS, AND CLEANING METHOD
- Publication number 20240207908
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Satoshi SHIMMURA
- B08 - CLEANING
Information Patent Application
MOTOR CONTROL METHOD, TRANSFER DEVICE, AND STORING MEDIUM
- Publication number 20240120867
- Publication date Apr 11, 2024
- TOKYO ELECTRON LIMITED
- Youichi MASAKI
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SOLUTION TREATMENT APPARATUS AND CLEANING METHOD
- Publication number 20240085813
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Kenta SHIBASAKI
- B08 - CLEANING
Information Patent Application
SOLUTION TREATMENT APPARATUS AND CLEANING METHOD
- Publication number 20220113643
- Publication date Apr 14, 2022
- TOKYO ELECTRON LIMITED
- Kenta SHIBASAKI
- B08 - CLEANING
Information Patent Application
NOZZLE STANDBY DEVICE, LIQUID PROCESSING APPARATUS AND OPERATION ME...
- Publication number 20220084844
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Satoshi Shimmura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210039131
- Publication date Feb 11, 2021
- TOKYO ELECTRON LIMITED
- Satoshi Shimmura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PROCESSING LIQUID SUPPLYING APPARATUS AND PROCESSING LIQUID SUPPLYI...
- Publication number 20200227286
- Publication date Jul 16, 2020
- TOKYO ELECTRON LIMITED
- Yuichi Terashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS AND COATING AND DEVELOPING METHOD
- Publication number 20200110343
- Publication date Apr 9, 2020
- TOKYO ELECTRON LIMITED
- Keigo Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FILTER UNIT PRETREATMENT METHOD, TREATMENT LIQUID SUPPLY APPARATUS,...
- Publication number 20200016521
- Publication date Jan 16, 2020
- TOKYO ELECTRON LIMITED
- Yuichi YOSHIDA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
COATED FILM REMOVING APPARATUS, COATED FILM REMOVING METHOD AND STO...
- Publication number 20180211832
- Publication date Jul 26, 2018
- TOKYO ELECTRON LIMITED
- Takafumi HASIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING LIQUID SUPPLYING APPARATUS AND METHOD OF SUPPLYING PROCE...
- Publication number 20180074407
- Publication date Mar 15, 2018
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS LIQUID SUPPLY APPARATUS OPERATING METHOD, PROCESS LIQUID SU...
- Publication number 20170043287
- Publication date Feb 16, 2017
- TOKYO ELECTRON LIMITED
- Hiroshi MARUMOTO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
FILTER UNIT PRETREATMENT METHOD, TREATMENT LIQUID SUPPLY APPARATUS,...
- Publication number 20160236124
- Publication date Aug 18, 2016
- TOKYO ELECTRON LIMITED
- Yuichi YOSHIDA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
COATING TREATMENT METHOD WITH AIRFLOW CONTROL, AND NON-TRANSITORY R...
- Publication number 20150371853
- Publication date Dec 24, 2015
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILTER DEVICE
- Publication number 20150151227
- Publication date Jun 4, 2015
- TOKYO ELECTRON LIMITED
- Koji TAKAYANAGI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PROCESSING LIQUID SUPPLYING APPARATUS AND METHOD OF SUPPLYING PROCE...
- Publication number 20150125793
- Publication date May 7, 2015
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING-LIQUID SUPPLY APPARATUS AND PROCESSING-LIQUID SUPPLY METHOD
- Publication number 20150090340
- Publication date Apr 2, 2015
- TOKYO ELECTRON LIMITED
- Koji Takayanagi
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
PROCESSING LIQUID SUPPLYING APPARATUS AND PROCESSING LIQUID SUPPLYI...
- Publication number 20150092167
- Publication date Apr 2, 2015
- TOKYO ELECTRON LIMITED
- Yuichi Terashita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20140174475
- Publication date Jun 26, 2014
- TOKYO ELECTRON LIMITED
- Koji TAKAYANAGI
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
PROCESS LIQUID SUPPLY APPARATUS OPERATING METHOD, PROCESS LIQUID SU...
- Publication number 20140034584
- Publication date Feb 6, 2014
- TOKYO ELECTRON LIMITED
- Hiroshi MARUMOTO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND COATING TREA...
- Publication number 20130295777
- Publication date Nov 7, 2013
- Katsunori ICHINO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING TREATMENT METHOD, COATING TREATMENT APPARATUS, AND COMPUTER...
- Publication number 20130239887
- Publication date Sep 19, 2013
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING TREATMENT APPARATUS, COATING AND DEVELOPING TREATMENT SYSTE...
- Publication number 20120276753
- Publication date Nov 1, 2012
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND COATING TREA...
- Publication number 20110052807
- Publication date Mar 3, 2011
- TOKYO ELECTRON LIMITED
- Katsunori Ichino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Solution treatment apparatus, solution treatment method and resist...
- Publication number 20100227056
- Publication date Sep 9, 2010
- TOKYO ELECTRON LIMITED
- Koji Takayanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING METHOD
- Publication number 20100209607
- Publication date Aug 19, 2010
- TOKYO ELECTRON LIMITED
- Koji Takayanagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING TREATMENT METHOD, COATING TREATMENT APPARATUS, AND COMPUTER...
- Publication number 20100112209
- Publication date May 6, 2010
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF TREATING SUBSTRATE AND COMPUTER STORAGE MEDIUM
- Publication number 20090181174
- Publication date Jul 16, 2009
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING TREATMENT METHOD, COATING TREATMENT APPARATUS, AND COMPUTER...
- Publication number 20090087559
- Publication date Apr 2, 2009
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Koji TAKAYANAGI

Person

Patents Grantslast 30 patents

Solution treatment apparatus and cleaning method

Nozzle standby device, liquid processing apparatus and operation me...

Processing liquid supplying apparatus and processing liquid supplyi...

Substrate processing apparatus

Coated film removing apparatus

Filter unit pretreatment method, treatment liquid supply apparatus,...

Coating and developing apparatus and coating and developing method

Liquid processing apparatus, liquid processing method, and storage...

Filter unit pretreatment method, treatment liquid supply apparatus,...

Processing liquid supplying apparatus and method of supplying proce...

Processing liquid supplying apparatus and processing liquid supplyi...

Coating treatment method with airflow control, and non-transitory r...

Processing liquid supplying apparatus and method of supplying proce...

Processing-liquid supply apparatus and processing-liquid supply method

Process liquid supply apparatus operating method, process liquid su...

Process liquid supply apparatus operating method, process liquid su...

Coating and development treatment system with airflow control inclu...

Coating treatment method

Coating treatment method, coating treatment apparatus, and computer...

Coating treatment method, computer storage medium, and coating trea...

Coating treatment method, coating treatment apparatus, and computer...

Solution treatment apparatus, solution treatment method and resist...

Coating treatment method, coating treatment apparatus, and computer...

Coating method

Coater cup

Patents Applicationslast 30 patents

CLEANING JIG, COATING APPARATUS, AND CLEANING METHOD

MOTOR CONTROL METHOD, TRANSFER DEVICE, AND STORING MEDIUM

SOLUTION TREATMENT APPARATUS AND CLEANING METHOD

SOLUTION TREATMENT APPARATUS AND CLEANING METHOD

NOZZLE STANDBY DEVICE, LIQUID PROCESSING APPARATUS AND OPERATION ME...

SUBSTRATE PROCESSING APPARATUS

PROCESSING LIQUID SUPPLYING APPARATUS AND PROCESSING LIQUID SUPPLYI...

COATING AND DEVELOPING APPARATUS AND COATING AND DEVELOPING METHOD

FILTER UNIT PRETREATMENT METHOD, TREATMENT LIQUID SUPPLY APPARATUS,...

COATED FILM REMOVING APPARATUS, COATED FILM REMOVING METHOD AND STO...

PROCESSING LIQUID SUPPLYING APPARATUS AND METHOD OF SUPPLYING PROCE...

PROCESS LIQUID SUPPLY APPARATUS OPERATING METHOD, PROCESS LIQUID SU...

FILTER UNIT PRETREATMENT METHOD, TREATMENT LIQUID SUPPLY APPARATUS,...

COATING TREATMENT METHOD WITH AIRFLOW CONTROL, AND NON-TRANSITORY R...

FILTER DEVICE

PROCESSING LIQUID SUPPLYING APPARATUS AND METHOD OF SUPPLYING PROCE...

PROCESSING-LIQUID SUPPLY APPARATUS AND PROCESSING-LIQUID SUPPLY METHOD

PROCESSING LIQUID SUPPLYING APPARATUS AND PROCESSING LIQUID SUPPLYI...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...

PROCESS LIQUID SUPPLY APPARATUS OPERATING METHOD, PROCESS LIQUID SU...

COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND COATING TREA...

COATING TREATMENT METHOD, COATING TREATMENT APPARATUS, AND COMPUTER...

COATING TREATMENT APPARATUS, COATING AND DEVELOPING TREATMENT SYSTE...

COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND COATING TREA...

Solution treatment apparatus, solution treatment method and resist...

COATING METHOD

COATING TREATMENT METHOD, COATING TREATMENT APPARATUS, AND COMPUTER...

METHOD OF TREATING SUBSTRATE AND COMPUTER STORAGE MEDIUM

COATING TREATMENT METHOD, COATING TREATMENT APPARATUS, AND COMPUTER...