Koji Tsunekawa

Person

Hachiooji, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Sputtering apparatus, film deposition method, and control device
- Patent number 10,636,634
- Issue date Apr 28, 2020
- Canon Anelva Corporation
- Koji Tsunekawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing magnetoresistive device
- Patent number 10,629,804
- Issue date Apr 21, 2020
- Canon Anelva Corporation
- Yoshinori Nagamine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus and recording medium for recording control pro...
- Patent number 10,378,100
- Issue date Aug 13, 2019
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus, film deposition method, and control device
- Patent number 9,991,102
- Issue date Jun 5, 2018
- Canon Anelva Corporation
- Koji Tsunekawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing apparatus
- Patent number 9,752,226
- Issue date Sep 5, 2017
- Canon Anelva Corporation
- Koji Tsunekawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus and sputtering method
- Patent number 9,449,800
- Issue date Sep 20, 2016
- Canon Anelva Corporation
- Koji Tsunekawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing apparatus
- Patent number 9,039,873
- Issue date May 26, 2015
- CANON ANELVA CORPORATION
- Koji Tsunekawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-frequency sputtering device
- Patent number 9,017,535
- Issue date Apr 28, 2015
- Canon Anelva Corporation
- Yoshinori Nagamine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing magnetoresistive element, sputter depositio...
- Patent number 8,932,438
- Issue date Jan 13, 2015
- Canon Anelva Corporation
- Koji Tsunekawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Magnetoresistance effect device and method of production of the same
- Patent number 8,934,290
- Issue date Jan 13, 2015
- Canon Anelva Corporation
- David D. Djayaprawira
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Vacuum heating/cooling apparatus and manufacturing method of magnet...
- Patent number 8,837,924
- Issue date Sep 16, 2014
- Canon Anelva Corporation
- Koji Tsunekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of production of a magnetoresistance effect device
- Patent number 8,394,649
- Issue date Mar 12, 2013
- Canaon Anelva Corporation
- David D. Djayaprawira
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Plasma processing apparatus, magnetoresistive device manufacturing...
- Patent number 8,377,270
- Issue date Feb 19, 2013
- Canon Anelva Corporation
- Koji Tsunekawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing magnetoresistive device and apparatus for m...
- Patent number 8,367,156
- Issue date Feb 5, 2013
- Canon Anelva Corporation
- Yoshinori Nagamine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and apparatus and method of manufact...
- Patent number 8,246,798
- Issue date Aug 21, 2012
- Canon Anelva Corporation
- Hiroyuki Hosoya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Magnetoresistive element, method of manufacturing the same, and mag...
- Patent number 8,174,800
- Issue date May 8, 2012
- Canon Anelva Corporation
- Koji Tsunekawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Phase-change memory element, phase-change memory cell, vacuum proce...
- Patent number 8,143,611
- Issue date Mar 27, 2012
- Canon Anelva Corporation
- Young-suk Choi
- G11 - INFORMATION STORAGE
Information Patent Grant
Tunnel magnetoresistive thin film
- Patent number 8,139,325
- Issue date Mar 20, 2012
- Canon Anelva Corporation
- Koji Tsunekawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Sputtering apparatus and method for controlling the same
- Patent number 8,118,981
- Issue date Feb 21, 2012
- Canon Anelva Corporation
- Koji Tsunekawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing a magnetoresistive multilayer film
- Patent number 7,914,654
- Issue date Mar 29, 2011
- Anelva Corporation
- David Djulianto Djayaprawira
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Magnetoresistance effect device
- Patent number 7,813,088
- Issue date Oct 12, 2010
- Canon Anelva Corporation
- Koji Tsunekawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for depositing a magnetoresistive multilayer film
- Patent number 7,771,570
- Issue date Aug 10, 2010
- Canon Anelva Corporation
- David Djulianto Djayaprawira
- G11 - INFORMATION STORAGE
Information Patent Grant
Magnetoresistance effect device and method of production thereof
- Patent number 7,727,409
- Issue date Jun 1, 2010
- Canon Anelva Corporation
- Hiroki Maehara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetoresistance effect device and a preform therefor
- Patent number 7,652,852
- Issue date Jan 26, 2010
- Canon Anelva Corporation
- Hiroki Maehara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing a magnetoresistive multilayer film
- Patent number 7,603,763
- Issue date Oct 20, 2009
- Canon Anelva Corporation
- David Djulianto Djayaprawira
- G11 - INFORMATION STORAGE
Information Patent Grant
Method of production of spin valve type giant magnetoresistive thin...
- Patent number 6,720,036
- Issue date Apr 13, 2004
- Anelva Corporation
- Koji Tsunekawa
- G11 - INFORMATION STORAGE
Information Patent Grant
Magnetic multi-layer film manufacturing apparatus
- Patent number 6,641,703
- Issue date Nov 4, 2003
- Anelva Corporation
- Shuji Nomura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic film-forming device and method
- Patent number 6,610,373
- Issue date Aug 26, 2003
- Anelva Corporation
- Daisuke Nakajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
STACKED STRUCTURE, MEMORY DEVICE AND METHOD OF MANUFACTURING STACKE...
- Publication number 20220415912
- Publication date Dec 29, 2022
- Canon ANELVA Corporation
- Koji TSUNEKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING APPARATUS, FILM DEPOSITION METHOD, AND CONTROL DEVICE
- Publication number 20180254172
- Publication date Sep 6, 2018
- Canon ANELVA Corporation
- Koji TSUNEKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING APPARATUS
- Publication number 20170101708
- Publication date Apr 13, 2017
- Canon ANELVA Corporation
- Koji TSUNEKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS, FILM DEPOSITION METHOD, AND CONTROL DEVICE
- Publication number 20160079045
- Publication date Mar 17, 2016
- Canon ANELVA Corporation
- Koji TSUNEKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA TREATMENT APPARATUS AND SUBSTRATE TREATMENT SYSTEM
- Publication number 20150107516
- Publication date Apr 23, 2015
- Canon ANELVA Corporation
- Koji TSUNEKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING APPARATUS AND RECORDING MEDIUM FOR RECORDING CONTROL PRO...
- Publication number 20150101927
- Publication date Apr 16, 2015
- Canon ANELVA Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS AND SPUTTERING METHOD
- Publication number 20150096881
- Publication date Apr 9, 2015
- Canon ANELVA Corporation
- Koji TSUNEKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING APPARATUS
- Publication number 20150001068
- Publication date Jan 1, 2015
- Canon ANELVA Corporation
- Koji TSUNEKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNNEL MAGNETO-RESISTANCE ELEMENT MANUFACTURING APPARATUS
- Publication number 20140353149
- Publication date Dec 4, 2014
- Takuya SEINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETORESISTANCE EFFECT DEVICE AND METHOD OF PRODUCTION OF THE SAME
- Publication number 20140024140
- Publication date Jan 23, 2014
- National Institute of Advanced Industrial Science and Technology
- David D. Djayaprawira
- B82 - NANO-TECHNOLOGY
Information Patent Application
MANUFACTURING APPARATUS
- Publication number 20130277207
- Publication date Oct 24, 2013
- Koji TSUNEKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FABRICATING AND APPARATUS OF FABRICATING TUNNEL MAGNETIC...
- Publication number 20130134032
- Publication date May 30, 2013
- Canon ANELVA Corporation
- Koji TSUNEKAWA
- B82 - NANO-TECHNOLOGY
Information Patent Application
SPUTTERING APPARATUS, FILM DEPOSITION METHOD, AND CONTROL DEVICE
- Publication number 20130105298
- Publication date May 2, 2013
- Canon ANELVA Corporation
- Koji TSUNEKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM HEATING/COOLING APPARATUS AND MANUFACTURING METHOD OF MAGNET...
- Publication number 20120193071
- Publication date Aug 2, 2012
- Canon ANELVA Corporation
- Koji Tsunekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND APPARATUS AND METHOD OF MANUFACT...
- Publication number 20110303527
- Publication date Dec 15, 2011
- Canon ANELVA Corporation
- Hiroyuki Hosoya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING MAGNETORESISTIVE DEVICE AND APPARATUS FOR M...
- Publication number 20110262634
- Publication date Oct 27, 2011
- Canon ANELVA Corporation
- Yoshinori Nagamine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM HEATING AND COOLING APPARATUS
- Publication number 20110253037
- Publication date Oct 20, 2011
- Canon ANELVA Corporation
- Koji Tsunekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, MAGNETORESISTIVE DEVICE MANUFACTURING...
- Publication number 20110203734
- Publication date Aug 25, 2011
- Canon ANELVA Corporation
- Tsunekawa Koji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING MAGNETORESISTIVE ELEMENT, SPUTTER DEPOSITIO...
- Publication number 20110139606
- Publication date Jun 16, 2011
- Canon ANELVA Corporation
- Koji TSUNEKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING MAGNETORESISTANCE ELEMENT AND STORAGE MEDIU...
- Publication number 20110143460
- Publication date Jun 16, 2011
- Canon ANELVA Corporation
- Koji Tsunekawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETORESISTANCE EFFECT DEVICE AND METHOD OF PRODUCTION OF THE SAME
- Publication number 20110094875
- Publication date Apr 28, 2011
- Canon ANELVA Corporation
- David D. Djayaprawira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS AND RECORDING MEDIUM FOR RECORDING CONTROL PRO...
- Publication number 20110042209
- Publication date Feb 24, 2011
- Canon ANELVA Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHASE-CHANGE MEMORY ELEMENT, PHASE-CHANGE MEMORY CELL, VACUUM PROCE...
- Publication number 20100328997
- Publication date Dec 30, 2010
- Canon ANELVA Corporation
- Young-suk Choi
- G11 - INFORMATION STORAGE
Information Patent Application
MAGNETIC TUNNEL JUNCTION DEVICE WITH MAGNETIC FREE LAYER HAVING SAN...
- Publication number 20100316890
- Publication date Dec 16, 2010
- Canon ANELVA Corporation
- Young-suk CHOI
- G01 - MEASURING TESTING
Information Patent Application
DRY ETCHING METHOD, MAGNETO-RESISTIVE ELEMENT, AND METHOD AND APPAR...
- Publication number 20100310902
- Publication date Dec 9, 2010
- Canon ANELVA Corporation
- Tomoaki Osada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH-FREQUENCY SPUTTERING DEVICE
- Publication number 20100213047
- Publication date Aug 26, 2010
- Canon ANELVA Corporation
- Yoshinori Nagamine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM THIN FILM FORMING APPARATUS
- Publication number 20100200394
- Publication date Aug 12, 2010
- Canon ANELVA Corporation
- Yoshinori Nagamine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNNEL MAGNETORESISTIVE THIN FILM AND MAGNETIC MULTILAYER FILM FORM...
- Publication number 20100178528
- Publication date Jul 15, 2010
- CANON ANELVA CORPORATION
- Koji Tsunekawa
- G01 - MEASURING TESTING
Information Patent Application
SPUTTERING METHOD AND SPUTTERING APPARATUS
- Publication number 20100133092
- Publication date Jun 3, 2010
- Canon ANELVA Corporation
- Kimiko Mashimo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATING METHOD OF MAGNETORESISTIVE ELEMENT, AND STORAGE MEDIUM
- Publication number 20100080894
- Publication date Apr 1, 2010
- Canon ANELVA Corporation
- Koji Tsunekawa
- G11 - INFORMATION STORAGE

Koji Tsunekawa

Person

Patents Grantslast 30 patents

Sputtering apparatus, film deposition method, and control device

Method of manufacturing magnetoresistive device

Sputtering apparatus and recording medium for recording control pro...

Sputtering apparatus, film deposition method, and control device

Manufacturing apparatus

Sputtering apparatus and sputtering method

Manufacturing apparatus

High-frequency sputtering device

Method of manufacturing magnetoresistive element, sputter depositio...

Magnetoresistance effect device and method of production of the same

Vacuum heating/cooling apparatus and manufacturing method of magnet...

Method of production of a magnetoresistance effect device

Plasma processing apparatus, magnetoresistive device manufacturing...

Method of manufacturing magnetoresistive device and apparatus for m...

Substrate processing apparatus and apparatus and method of manufact...

Magnetoresistive element, method of manufacturing the same, and mag...

Phase-change memory element, phase-change memory cell, vacuum proce...

Tunnel magnetoresistive thin film

Sputtering apparatus and method for controlling the same

Method and apparatus for depositing a magnetoresistive multilayer film

Magnetoresistance effect device

Method and apparatus for depositing a magnetoresistive multilayer film

Magnetoresistance effect device and method of production thereof

Magnetoresistance effect device and a preform therefor

Method for manufacturing a magnetoresistive multilayer film

Method of production of spin valve type giant magnetoresistive thin...

Magnetic multi-layer film manufacturing apparatus

Magnetic film-forming device and method

Patents Applicationslast 30 patents

STACKED STRUCTURE, MEMORY DEVICE AND METHOD OF MANUFACTURING STACKE...

SPUTTERING APPARATUS, FILM DEPOSITION METHOD, AND CONTROL DEVICE

MANUFACTURING APPARATUS

SPUTTERING APPARATUS, FILM DEPOSITION METHOD, AND CONTROL DEVICE

PLASMA TREATMENT APPARATUS AND SUBSTRATE TREATMENT SYSTEM

SPUTTERING APPARATUS AND RECORDING MEDIUM FOR RECORDING CONTROL PRO...

SPUTTERING APPARATUS AND SPUTTERING METHOD

MANUFACTURING APPARATUS

TUNNEL MAGNETO-RESISTANCE ELEMENT MANUFACTURING APPARATUS

MAGNETORESISTANCE EFFECT DEVICE AND METHOD OF PRODUCTION OF THE SAME

MANUFACTURING APPARATUS

METHOD OF FABRICATING AND APPARATUS OF FABRICATING TUNNEL MAGNETIC...

SPUTTERING APPARATUS, FILM DEPOSITION METHOD, AND CONTROL DEVICE

VACUUM HEATING/COOLING APPARATUS AND MANUFACTURING METHOD OF MAGNET...

SUBSTRATE PROCESSING APPARATUS AND APPARATUS AND METHOD OF MANUFACT...

METHOD OF MANUFACTURING MAGNETORESISTIVE DEVICE AND APPARATUS FOR M...

VACUUM HEATING AND COOLING APPARATUS

PLASMA PROCESSING APPARATUS, MAGNETORESISTIVE DEVICE MANUFACTURING...

METHOD OF MANUFACTURING MAGNETORESISTIVE ELEMENT, SPUTTER DEPOSITIO...

METHOD OF MANUFACTURING MAGNETORESISTANCE ELEMENT AND STORAGE MEDIU...

MAGNETORESISTANCE EFFECT DEVICE AND METHOD OF PRODUCTION OF THE SAME

SPUTTERING APPARATUS AND RECORDING MEDIUM FOR RECORDING CONTROL PRO...

PHASE-CHANGE MEMORY ELEMENT, PHASE-CHANGE MEMORY CELL, VACUUM PROCE...

MAGNETIC TUNNEL JUNCTION DEVICE WITH MAGNETIC FREE LAYER HAVING SAN...

DRY ETCHING METHOD, MAGNETO-RESISTIVE ELEMENT, AND METHOD AND APPAR...

HIGH-FREQUENCY SPUTTERING DEVICE

VACUUM THIN FILM FORMING APPARATUS

TUNNEL MAGNETORESISTIVE THIN FILM AND MAGNETIC MULTILAYER FILM FORM...

SPUTTERING METHOD AND SPUTTERING APPARATUS

FABRICATING METHOD OF MAGNETORESISTIVE ELEMENT, AND STORAGE MEDIUM