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Koji Uchitani
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Kyoto, JP
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last 30 patents
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Patent Grant
Developing apparatus, developing method and substrate processing ap...
Patent number
6,089,762
Issue date
Jul 18, 2000
Dainippon Screen Mfg. Co., Ltd.
Masahiro Mimasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Developing apparatus and developing method
Patent number
5,984,540
Issue date
Nov 16, 1999
Dainippon Screen Mfg. Co., Ltd.
Masahiro Mimasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY