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Koji YAMAGISHI

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  • Sendai City, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 11,676,799
    • Issue date Jun 13, 2023
    • Tokyo Electron Limited
    • Koji Yamagishi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Radical deactivation component, plasma processing apparatus using t...
    • Patent number 11,380,522
    • Issue date Jul 5, 2022
    • Tokyo Electron Limited
    • Koji Yamagishi
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Grant

    Processing method and processing apparatus
    • Patent number 10,676,823
    • Issue date Jun 9, 2020
    • Tokyo Electron Limited
    • Ryota Sakane
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film-forming apparatus
    • Patent number 9,831,067
    • Issue date Nov 28, 2017
    • Tokyo Electron Limited
    • Masahide Iwasaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus and film formation method
    • Patent number 9,765,430
    • Issue date Sep 19, 2017
    • Tokyo Electron Limited
    • Takehisa Saito
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 9,343,270
    • Issue date May 17, 2016
    • Tokyo Electron Limited
    • Toshihisa Nozawa
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PIPING SYSTEM AND PROCESSING APPARATUS
    • Publication number 20210332931
    • Publication date Oct 28, 2021
    • TOKYO ELECTRON LIMITED
    • Kazuki HOSHI
    • F28 - HEAT EXCHANGE IN GENERAL
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20210287879
    • Publication date Sep 16, 2021
    • TOKYO ELECTRON LIMITED
    • Koji YAMAGISHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • Publication number 20210183631
    • Publication date Jun 17, 2021
    • TOKYO ELECTRON LIMITED
    • Koji Yamagishi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RADICAL DEACTIVATION COMPONENT, PLASMA PROCESSING APPARATUS USING T...
    • Publication number 20190362939
    • Publication date Nov 28, 2019
    • TOKYO ELECTRON LIMITED
    • Koji YAMAGISHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESSING METHOD AND PROCESSING APPARATUS
    • Publication number 20180148838
    • Publication date May 31, 2018
    • TOKYO ELECTRON LIMITED
    • Ryota Sakane
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND FILM FORMATION METHOD
    • Publication number 20170009338
    • Publication date Jan 12, 2017
    • TOKYO ELECTRON LIMITED
    • Takehisa SAITO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING APPARATUS
    • Publication number 20150279627
    • Publication date Oct 1, 2015
    • TOKYO ELECTRON LIMITED
    • Masahide Iwasaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20150176125
    • Publication date Jun 25, 2015
    • TOKYO ELECTRON LIMITED
    • Toshihisa NOZAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20150155141
    • Publication date Jun 4, 2015
    • TOKYO ELECTRON LIMITED
    • Yasuo KOBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20140238607
    • Publication date Aug 28, 2014
    • TOKYO ELECTRON LIMITED
    • Toshihisa NOZAWA
    • H01 - BASIC ELECTRIC ELEMENTS