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Koji Yamashita
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Billerica, MA, US
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last 30 patents
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Patent Grant
Fabrication method of semiconductor device
Patent number
8,741,786
Issue date
Jun 3, 2014
Tokyo Electron Limited
Koji Akiyama
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
FABRICATION METHOD OF SEMICONDUCTOR DEVICE
Publication number
20120309207
Publication date
Dec 6, 2012
TOKYO ELECTRON LIMITED
Koji AKIYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Publication number
20110039389
Publication date
Feb 17, 2011
TOKYO ELECTRON LIMITED
Koji YAMASHITA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF PROCESSING SUBSTRATE
Publication number
20100068896
Publication date
Mar 18, 2010
TOKYO ELECTRON LIMITED
Takuya SUGAWARA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...