Kojiro Sugane

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Chiba, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma CVD system comprising plural upper electrodes
- Patent number 5,296,037
- Issue date Mar 22, 1994
- Kawasaki Steel Corporation
- Nobuyoshi Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...