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Koki CHINO
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Kurokawa-gun, JP
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Patents Grants
last 30 patents
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Patent Grant
Etching method and plasma processing apparatus
Patent number
12,198,937
Issue date
Jan 14, 2025
Tokyo Electron Limited
Koki Chino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching, device manufacturing method, and plasma processi...
Patent number
11,121,001
Issue date
Sep 14, 2021
Tokyo Electron Limited
Satoshi Yamada
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20220139719
Publication date
May 5, 2022
TOKYO ELECTRON LIMITED
Koki CHINO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ETCHING SILICON OXIDE FILM AND PLASMA PROCESSING APPARATUS
Publication number
20210082712
Publication date
Mar 18, 2021
TOKYO ELECTRON LIMITED
Koki CHINO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ETCHING, DEVICE MANUFACTURING METHOD, AND PLASMA PROCESSI...
Publication number
20210057228
Publication date
Feb 25, 2021
TOKYO ELECTRON LIMITED
Satoshi YAMADA
H01 - BASIC ELECTRIC ELEMENTS