Koki Nishimuko

Follow

Person

Kumamoto-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and apparatus
- Patent number 8,231,285
- Issue date Jul 31, 2012
- Tokyo Electron Limited
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist pattern forming method
- Patent number 7,780,366
- Issue date Aug 24, 2010
- Tokyo Electron Limited
- Kunie Ogata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resist pattern forming method
- Patent number 7,648,292
- Issue date Jan 19, 2010
- Tokyo Electron Limited
- Kunie Ogata
Information Patent Grant
Resist pattern forming apparatus and method thereof
- Patent number 7,488,127
- Issue date Feb 10, 2009
- Tokyo Electron Limited
- Kunie Ogata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resist pattern forming apparatus and method thereof
- Patent number 6,984,477
- Issue date Jan 10, 2006
- Tokyo Electron Limited
- Kunie Ogata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus for coating substrate with resist and developi...
- Patent number 6,281,962
- Issue date Aug 28, 2001
- Tokyo Electron Limited
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
RESIST PATTERN FORMING METHOD
- Publication number 20100047702
- Publication date Feb 25, 2010
- TOKYO ELECTRON LIMITED
- Kunie OGATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST PATTERN FORMING METHOD
- Publication number 20080182211
- Publication date Jul 31, 2008
- TOKYO ELECTRON LIMITED
- Kunie OGATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Resist pattern forming apparatus and method thereof
- Publication number 20050271382
- Publication date Dec 8, 2005
- TOKYO ELECTRON LIMITED
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Resist pattern forming apparatus and method thereof
- Publication number 20020037462
- Publication date Mar 28, 2002
- Kunie Ogata
- H01 - BASIC ELECTRIC ELEMENTS