Koki TAMAGAWA

Person

Nagano, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Tray and wafer holding apparatus
- Patent number 9,837,297
- Issue date Dec 5, 2017
- Shinko Electric Industries Co., Ltd.
- Koki Tamagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck apparatus
- Patent number 9,252,039
- Issue date Feb 2, 2016
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric layer for electrostatic chuck and electrostatic chuck
- Patent number 9,120,704
- Issue date Sep 1, 2015
- Nippon Tungsten Co., Ltd.
- Kouta Tsutsumi
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Substrate, substrate holding apparatus, analysis apparatus, program...
- Patent number 8,686,743
- Issue date Apr 1, 2014
- Philtech Inc.
- Yuji Furumura
- G01 - MEASURING TESTING
Information Patent Grant
Substrate temperature regulation fixed apparatus
- Patent number 8,641,825
- Issue date Feb 4, 2014
- Shinko Electric Industries Co., Ltd.
- Hiroshi Yonekura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate temperature control fixing apparatus
- Patent number 8,505,928
- Issue date Aug 13, 2013
- Shinko Electric Industries Co., Ltd.
- Miki Saito
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate for electrostatic chuck and electrostatic chuck
- Patent number 8,441,772
- Issue date May 14, 2013
- Shinko Electric Industries Co., Ltd.
- Tadayoshi Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and substrate temperature adjusting-fixing device
- Patent number 8,199,454
- Issue date Jun 12, 2012
- Shinko Electric Industries Co., Ltd.
- Tomoaki Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and substrate temperature control fixing apparatus
- Patent number 8,068,326
- Issue date Nov 29, 2011
- Shinko Electric Industries Co., Ltd.
- Tomoaki Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 8,023,248
- Issue date Sep 20, 2011
- Shinko Electric Industries Co., Ltd.
- Hiroshi Yonekura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TRAY AND WAFER HOLDING APPARATUS
- Publication number 20150371885
- Publication date Dec 24, 2015
- Shinko Electric Industries Co., Ltd.
- Koki TAMAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK APPARATUS
- Publication number 20140254061
- Publication date Sep 11, 2014
- SHINKO ELECTRIC INDUSTRIES CO., L TO.
- Norio SHIRAIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRIC LAYER FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK
- Publication number 20140103612
- Publication date Apr 17, 2014
- NIPPON TUNGSTEN CO., LTD.
- Kouta Tsutsumi
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
SUBSTRATE FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK
- Publication number 20110096461
- Publication date Apr 28, 2011
- Shinko Electric Industries Co., Ltd.
- Tadayoshi YOSHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20100220425
- Publication date Sep 2, 2010
- Shinko Electric Industries Co., Ltd.
- Hiroshi Yonekura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TEMPERATURE CONTROL FIXING APPARATUS
- Publication number 20100156055
- Publication date Jun 24, 2010
- Shinko Electric Industries Co., Ltd.
- Miki Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate, substrate holding apparatus, analysis apparatus, program...
- Publication number 20100134122
- Publication date Jun 3, 2010
- Philtech Inc.
- Yuji Furumura
- G01 - MEASURING TESTING
Information Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE TEMPERATURE CONTROL FIXING APPARATUS
- Publication number 20090310274
- Publication date Dec 17, 2009
- Shinko Electric Industries Co., Ltd.
- Tomoaki Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TEMPERATURE REGULATION FIXED APPARATUS
- Publication number 20090308538
- Publication date Dec 17, 2009
- Shinko Electric Industries Co., Ltd.
- Hiroshi YONEKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICE
- Publication number 20090168291
- Publication date Jul 2, 2009
- Shinko Electric Industries Co., Ltd.
- Tomoaki Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICES
- Publication number 20090159590
- Publication date Jun 25, 2009
- Shinko Electric Industries Co., Ltd.
- Hiroshi Yonekura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate heating device
- Publication number 20080110874
- Publication date May 15, 2008
- Shinko Electric Industries Co., Ltd.
- Naoto Hayashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrostatic chuck
- Publication number 20080037196
- Publication date Feb 14, 2008
- Shinko Electric Industries Co., Ltd.
- Hiroshi Yonekura
- H01 - BASIC ELECTRIC ELEMENTS

Koki TAMAGAWA

Person

Patents Grantslast 30 patents

Tray and wafer holding apparatus

Electrostatic chuck apparatus

Dielectric layer for electrostatic chuck and electrostatic chuck

Substrate, substrate holding apparatus, analysis apparatus, program...

Substrate temperature regulation fixed apparatus

Substrate temperature control fixing apparatus

Substrate for electrostatic chuck and electrostatic chuck

Electrostatic chuck and substrate temperature adjusting-fixing device

Electrostatic chuck and substrate temperature control fixing apparatus

Electrostatic chuck

Patents Applicationslast 30 patents

TRAY AND WAFER HOLDING APPARATUS

ELECTROSTATIC CHUCK APPARATUS

DIELECTRIC LAYER FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK

SUBSTRATE FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK

ELECTROSTATIC CHUCK

SUBSTRATE TEMPERATURE CONTROL FIXING APPARATUS

Substrate, substrate holding apparatus, analysis apparatus, program...

ELECTROSTATIC CHUCK AND SUBSTRATE TEMPERATURE CONTROL FIXING APPARATUS

SUBSTRATE TEMPERATURE REGULATION FIXED APPARATUS

ELECTROSTATIC CHUCK AND SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICE

SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICES

Substrate heating device

Electrostatic chuck