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Koki Yasuda

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Patents Grantslast 30 patents

  • Information Patent Grant

    Dry etching apparatus and method
    • Patent number 5,087,341
    • Issue date Feb 11, 1992
    • Anelva Corporation
    • Tsutomu Tsukada
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...