Konosuke Hayashi

Person

Kanagawa-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing liquid generator and substrate processing apparatus usin...
- Patent number 11,670,522
- Issue date Jun 6, 2023
- Shibaura Mechatronics Corporation
- Konosuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,607,863
- Issue date Mar 31, 2020
- Shibaura Mechatronics Corporation
- Konosuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Suction stage, lamination device, and method for manufacturing lami...
- Patent number 10,586,727
- Issue date Mar 10, 2020
- Shibaura Mechatronics Corporation
- Emi Matsui
- B32 - LAYERED PRODUCTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,460,961
- Issue date Oct 29, 2019
- Shibaura Mechatronics Corporation
- Yuji Nagashima
- B08 - CLEANING
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 10,406,566
- Issue date Sep 10, 2019
- SHIBAURA MECHATRONICS CORPORATION
- Jun Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,325,787
- Issue date Jun 18, 2019
- Shibaura Mechatronics Corporation
- Konosuke Hayashi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,281,210
- Issue date May 7, 2019
- Shibaura Mechatronics Corporation
- Kunihiro Miyazaki
- F26 - DRYING
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 10,276,406
- Issue date Apr 30, 2019
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke Hayashi
- B08 - CLEANING
Information Patent Grant
Device and method for treating a substrate with hydrofluoric and ni...
- Patent number 9,972,513
- Issue date May 15, 2018
- Shibaura Mechatronics Corporation
- Yuki Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,966,282
- Issue date May 8, 2018
- Shibaura Mechatronics Corporation
- Kunihiro Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,964,358
- Issue date May 8, 2018
- Shibaura Mechatronics Corporation
- Jun Matsushita
- F26 - DRYING
Information Patent Grant
Liquid feeding device and substrate treating device
- Patent number 9,811,096
- Issue date Nov 7, 2017
- Shibaura Mechatronics Corporation
- Konosuke Hayashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,795,999
- Issue date Oct 24, 2017
- Shibaura Mechatronics Corporation
- Takashi Ootagaki
- B08 - CLEANING
Information Patent Grant
Bonding apparatus and bonding process method
- Patent number 9,741,596
- Issue date Aug 22, 2017
- Shibaura Mechatronics Corporation
- Konosuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus and substrate treatment method
- Patent number 9,694,371
- Issue date Jul 4, 2017
- Shibaura Mechatronics Corporation
- Takashi Ootagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 9,607,865
- Issue date Mar 28, 2017
- Shibaura Mechatronics Corporation
- Konosuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bonding apparatus and method for manufacturing bonded substrate
- Patent number 9,586,391
- Issue date Mar 7, 2017
- Shibaura Mechatronics Corporation
- Konosuke Hayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 9,553,003
- Issue date Jan 24, 2017
- Shibaura Mechatronics Corporation
- Konosuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus and substrate treatment method
- Patent number 9,202,724
- Issue date Dec 1, 2015
- Shibaura Mechatronics Corporation
- Konosuke Hayashi
- B08 - CLEANING
Information Patent Grant
Spin processing apparatus and spin processing method
- Patent number 8,377,251
- Issue date Feb 19, 2013
- Shibaura Mechatronics Corporation
- Konosuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230307262
- Publication date Sep 28, 2023
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200135505
- Publication date Apr 30, 2020
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200135504
- Publication date Apr 30, 2020
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180096864
- Publication date Apr 5, 2018
- SHIBAURA MECHATRONICS CORPORATION
- Yuji Nagashima
- B08 - CLEANING
Information Patent Application
PROCESSING LIQUID GENERATOR AND SUBSTRATE PROCESSING APPARATUS USIN...
- Publication number 20180033651
- Publication date Feb 1, 2018
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170278729
- Publication date Sep 28, 2017
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20170259308
- Publication date Sep 14, 2017
- SHIBAURA MECHATRONICS CORPORATION
- Jun MATSUSHITA
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATING DEVICE AND SUBSTRATE TREATING METHOD
- Publication number 20170256423
- Publication date Sep 7, 2017
- SHIBAURA MECHATRONICS CORPORATION
- Yuki SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160322241
- Publication date Nov 3, 2016
- SHIBAURA MECHATRONICS CORPORATION
- Jun MATSUSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUCTION STAGE, LAMINATION DEVICE, AND METHOD FOR MANUFACTURING LAMI...
- Publication number 20160225655
- Publication date Aug 4, 2016
- SHIBAURA MECHATRONICS CORPORATION
- Emi Matsui
- B32 - LAYERED PRODUCTS
Information Patent Application
SUBSTRATE TREATMENT DEVICE, PEELING METHOD FOR LAMINATED SUBSTRATE,...
- Publication number 20160225613
- Publication date Aug 4, 2016
- SHIBAURA MECHATRONICS CORPORATION
- Takahiro Kanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160093486
- Publication date Mar 31, 2016
- SHIBAURA MECHATRONICS CORPORATION
- Kunihiro MIYAZAKI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160071746
- Publication date Mar 10, 2016
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- B08 - CLEANING
Information Patent Application
LIQUID FEEDING DEVICE AND SUBSTRATE TREATING DEVICE
- Publication number 20160062372
- Publication date Mar 3, 2016
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160025409
- Publication date Jan 28, 2016
- SHIBAURA MECHATRONICS CORPORATION
- Kunihiro MIYAZAKI
- F26 - DRYING
Information Patent Application
Bonding Apparatus and Method for Manufacturing Bonded Substrate
- Publication number 20160009070
- Publication date Jan 14, 2016
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke Hayashi
- B32 - LAYERED PRODUCTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20150273534
- Publication date Oct 1, 2015
- SHIBAURA MECHATRONICS CORPORATION
- Takashi OOTAGAKI
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20150273491
- Publication date Oct 1, 2015
- SHIBAURA MECHATRONICS CORPORATION
- Takashi OOTAGAKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20150090297
- Publication date Apr 2, 2015
- SHIBAURA MECHATRONICS CORPORATION
- Jun MATSUSHITA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20150090298
- Publication date Apr 2, 2015
- Shibaura Mechantronics Corporation
- Yuji NAGASHIMA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20150090296
- Publication date Apr 2, 2015
- SHIBAURA MECHATRONICS CORPORATION
- Yuji NAGASHIMA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20140261549
- Publication date Sep 18, 2014
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20140261554
- Publication date Sep 18, 2014
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20140261566
- Publication date Sep 18, 2014
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- B08 - CLEANING
Information Patent Application
BONDING APPARATUS AND BONDING PROCESS METHOD
- Publication number 20140182761
- Publication date Jul 3, 2014
- Konosuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING SOLUTION PRODUCING APPARATUS, CLEANING SOLUTION PRODUCING...
- Publication number 20140041694
- Publication date Feb 13, 2014
- SHIBAURA MECHATRONICS CORPORATION
- Kunihiro MIYAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPIN PROCESSING APPARATUS AND SPIN PROCESSING METHOD
- Publication number 20110073565
- Publication date Mar 31, 2011
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20100122772
- Publication date May 20, 2010
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- B08 - CLEANING

Konosuke Hayashi

Person

Patents Grantslast 30 patents

Processing liquid generator and substrate processing apparatus usin...

Substrate processing apparatus

Suction stage, lamination device, and method for manufacturing lami...

Substrate processing apparatus

Substrate processing device and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing device and substrate processing method

Device and method for treating a substrate with hydrofluoric and ni...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Liquid feeding device and substrate treating device

Substrate processing apparatus and substrate processing method

Bonding apparatus and bonding process method

Substrate treatment apparatus and substrate treatment method

Substrate processing device and substrate processing method

Bonding apparatus and method for manufacturing bonded substrate

Substrate processing device and substrate processing method

Substrate treatment apparatus and substrate treatment method

Spin processing apparatus and spin processing method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

PROCESSING LIQUID GENERATOR AND SUBSTRATE PROCESSING APPARATUS USIN...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATING DEVICE AND SUBSTRATE TREATING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUCTION STAGE, LAMINATION DEVICE, AND METHOD FOR MANUFACTURING LAMI...

SUBSTRATE TREATMENT DEVICE, PEELING METHOD FOR LAMINATED SUBSTRATE,...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

LIQUID FEEDING DEVICE AND SUBSTRATE TREATING DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Bonding Apparatus and Method for Manufacturing Bonded Substrate

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

BONDING APPARATUS AND BONDING PROCESS METHOD

CLEANING SOLUTION PRODUCING APPARATUS, CLEANING SOLUTION PRODUCING...

SPIN PROCESSING APPARATUS AND SPIN PROCESSING METHOD

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD