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Konrad Knapp
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Jena, DE
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last 30 patents
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Patent Grant
Method for making optical elements for microlithography, the lens s...
Patent number
7,679,806
Issue date
Mar 16, 2010
Schott AG
Gunther Wehrhan
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
Liquid And Method For Liquid Immersionlithography
Publication number
20080145794
Publication date
Jun 19, 2008
Martin Letz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Method for making optical elements for microlithography, the lens s...
Publication number
20060245043
Publication date
Nov 2, 2006
Gunther Wehrhan
C30 - CRYSTAL GROWTH
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Patent Application
Liquid and method for liquid immersion lithography
Publication number
20050186513
Publication date
Aug 25, 2005
Martin Letz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate material for X-ray optical components
Publication number
20040202278
Publication date
Oct 14, 2004
Carl-Zeiss Stiftung Trading as Schott-Glas and Carl Zeiss SMT AG
Udo Dinger
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING