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Kassel, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Systems and methods utilizing laser discharge electrodes with ceram...
Patent number
7,079,565
Issue date
Jul 18, 2006
Lambda Physik AG
Igor Bragin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Resonator arrangement for bandwidth control
Patent number
6,856,638
Issue date
Feb 15, 2005
Lambda Physik AG
Konstantin Aab
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for reduction of spectral fluctuations
Patent number
6,792,023
Issue date
Sep 14, 2004
Lambda Physik AG
Juergen Kleinschmidt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Line-narrowing optics module having improved mechanical performance
Patent number
6,760,358
Issue date
Jul 6, 2004
Lambda Physik AG
Kay Zimmermann
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Cooled electrodes for high repetition excimer or molecular fluorine...
Publication number
20050002427
Publication date
Jan 6, 2005
Igor Bragin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Fast linear motor for wavelength variation for lithography lasers
Publication number
20040190577
Publication date
Sep 30, 2004
Hans-Stephan Albrecht
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and methods utilizing laser discharge electrodes with ceram...
Publication number
20040131100
Publication date
Jul 8, 2004
Igor Bragin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Resonator arrangement for bandwidth control
Publication number
20020141471
Publication date
Oct 3, 2002
Lambda Physik AG
Konstantin Aab
H01 - BASIC ELECTRIC ELEMENTS