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Konstantin Makhratchev
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Freemont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Tunable temperature controlled substrate support assembly
Patent number
12,009,244
Issue date
Jun 11, 2024
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature controlled substrate support assembly
Patent number
11,158,526
Issue date
Oct 26, 2021
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck having thermally isolated zones with minimal cr...
Patent number
11,088,005
Issue date
Aug 10, 2021
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck with independent zone cooling and reduced cross...
Patent number
10,622,229
Issue date
Apr 14, 2020
Applied Materials, Inc.
Vijay Parkhe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tunable temperature controlled substrate support assembly
Patent number
10,535,544
Issue date
Jan 14, 2020
Applied Materials, Inc.
Vijay D. Parkhe
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Real time monitoring with closed loop chucking force control
Patent number
10,460,916
Issue date
Oct 29, 2019
Applied Materials, Inc.
Wendell Glenn Boyd
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pixilated cooling, temperature controlled substrate support assembly
Patent number
10,403,534
Issue date
Sep 3, 2019
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck having thermally isolated zones with minimal cr...
Patent number
10,304,715
Issue date
May 28, 2019
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck with external flow adjustments for improved tem...
Patent number
10,121,688
Issue date
Nov 6, 2018
Applied Materials, Inc.
Matthew J. Busche
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrostatic chuck with independent zone cooling and reduced cross...
Patent number
10,079,165
Issue date
Sep 18, 2018
Applied Materials, Inc.
Vijay Parkhe
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Electrostatic chuck having reduced power loss
Patent number
10,026,636
Issue date
Jul 17, 2018
Applied Materials, Inc.
Konstantin Makhratchev
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrostatic chuck having thermally isolated zones with minimal cr...
Patent number
9,991,148
Issue date
Jun 5, 2018
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High temperature electrostatic chuck with real-time heat zone regul...
Patent number
9,948,214
Issue date
Apr 17, 2018
Applied Materials, Inc.
Dmitry Lubomirsky
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Control systems employing deflection sensors to control clamping fo...
Patent number
9,875,923
Issue date
Jan 23, 2018
Applied Materials, Inc.
Wendell Boyd
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck having thermally isolated zones with minimal cr...
Patent number
9,666,466
Issue date
May 30, 2017
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck with external flow adjustments for improved tem...
Patent number
9,622,375
Issue date
Apr 11, 2017
Applied Materials, Inc.
Matthew J. Busche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control systems employing deflection sensors to control clamping fo...
Patent number
9,558,981
Issue date
Jan 31, 2017
Applied Materials, Inc.
Wendell Boyd
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck with internal flow adjustments for improved tem...
Patent number
9,520,315
Issue date
Dec 13, 2016
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tunable temperature controlled substrate support assembly
Patent number
9,472,435
Issue date
Oct 18, 2016
Applied Materials, Inc.
Vijay D. Parkhe
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for measuring wafer bias potential
Patent number
9,299,539
Issue date
Mar 29, 2016
Lam Research Corporation
Konstantin Makhratchev
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck having reduced power loss
Patent number
9,281,226
Issue date
Mar 8, 2016
Applied Materials, Inc.
Konstantin Makhratchev
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Single-body electrostatic chuck
Patent number
8,941,969
Issue date
Jan 27, 2015
Applied Materials, Inc.
Senh Thach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck with advanced RF and temperature uniformity
Patent number
8,937,800
Issue date
Jan 20, 2015
Applied Materials, Inc.
Dmitry Lubomirsky
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Methods and arrangement for plasma dechuck optimization based on co...
Patent number
8,797,705
Issue date
Aug 5, 2014
Lam Research Corporation
John C. Valcore
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for using an RC circuit to model trapped charge in an electr...
Patent number
8,055,489
Issue date
Nov 8, 2011
Lam Research Corporation
Konstantin Makhratchev
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Method of manufacturing semiconductor having group II-group VI comp...
Patent number
6,852,614
Issue date
Feb 8, 2005
University of Maine
Alvin D. Compaan
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Probe for direct wafer potential measurements
Patent number
6,714,033
Issue date
Mar 30, 2004
Lam Research Corporation
Konstantin Makhratchev
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
Publication number
20240321620
Publication date
Sep 26, 2024
Applied Materials, Inc.
Vijay D. PARKHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
Publication number
20220013374
Publication date
Jan 13, 2022
Applied Materials, Inc.
Vijay D. PARKHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
Publication number
20200152500
Publication date
May 14, 2020
Applied Materials, Inc.
Vijay D. PARKHE
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ELECTROSTATIC CHUCK HAVING THERMALLY ISOLATED ZONES WITH MINIMAL CR...
Publication number
20190279893
Publication date
Sep 12, 2019
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK WITH INDEPENDENT ZONE COOLING AND REDUCED CROSS...
Publication number
20180374724
Publication date
Dec 27, 2018
Applied Materials, Inc.
Vijay Parkhe
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
REAL TIME MONITORING WITH CLOSED LOOP CHUCKING FORCE CONTROL
Publication number
20180330926
Publication date
Nov 15, 2018
Applied Materials, Inc.
Wendell Glenn BOYD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK HAVING THERMALLY ISOLATED ZONES WITH MINIMAL CR...
Publication number
20180269098
Publication date
Sep 20, 2018
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK HAVING THERMALLY ISOLATED ZONES WITH MINIMAL CR...
Publication number
20170250100
Publication date
Aug 31, 2017
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK WITH EXTERNAL FLOW ADJUSTMENTS FOR IMPROVED TEM...
Publication number
20170213754
Publication date
Jul 27, 2017
Matthew J. Busche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL SYSTEMS EMPLOYING DEFLECTION SENSORS TO CONTROL CLAMPING FO...
Publication number
20170103911
Publication date
Apr 13, 2017
Applied Materials, Inc.
Wendell BOYD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
Publication number
20160329231
Publication date
Nov 10, 2016
Applied Materials, Inc.
Vijay D. PARKHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK HAVING REDUCED POWER LOSS
Publication number
20160163577
Publication date
Jun 9, 2016
Applied Materials, Inc.
Konstantin MAKHRATCHEV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
Publication number
20160027678
Publication date
Jan 28, 2016
Applied Materials, Inc.
Vijay D. PARKHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK WITH INDEPENDENT ZONE COOLING AND REDUCED CROSS...
Publication number
20150340255
Publication date
Nov 26, 2015
Vijay Parkhe
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
PIXILATED TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
Publication number
20150228513
Publication date
Aug 13, 2015
Applied Materials, Inc.
Vijay D. PARKHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK WITH INTERNAL FLOW ADJUSTMENTS FOR IMPROVED TEM...
Publication number
20150187626
Publication date
Jul 2, 2015
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK WITH EXTERNAL FLOW ADJUSTMENTS FOR IMPROVED TEM...
Publication number
20150187625
Publication date
Jul 2, 2015
Matthew J. Busche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL SYSTEMS EMPLOYING DEFLECTION SENSORS TO CONTROL CLAMPING FO...
Publication number
20150138687
Publication date
May 21, 2015
Applied Materials, Inc.
Wendell BOYD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PIXILATED COOLING, TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
Publication number
20150129165
Publication date
May 14, 2015
Applied Materials, Inc.
Vijay D. PARKHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK HAVING THERMALLY ISOLATED ZONES WITH MINIMAL CR...
Publication number
20140334060
Publication date
Nov 13, 2014
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SINGLE-BODY ELECTROSTATIC CHUCK
Publication number
20140177123
Publication date
Jun 26, 2014
Applied Materials, Inc.
Senh Thach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEFECT REDUCTION IN PLASMA PROCESSING
Publication number
20140049162
Publication date
Feb 20, 2014
George Thomas
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH TEMPERATURE ELECTROSTATIC CHUCK WITH REAL-TIME HEAT ZONE REGUL...
Publication number
20130284374
Publication date
Oct 31, 2013
Dmitry LUBOMIRSKY
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
ELECTROSTATIC CHUCK HAVING REDUCED POWER LOSS
Publication number
20130284709
Publication date
Oct 31, 2013
Konstantin MAKHRATCHEV
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ELECTROSTATIC CHUCK WITH ADVANCED RF AND TEMPERATURE UNIFORMITY
Publication number
20130279066
Publication date
Oct 24, 2013
Dmitry Lubomirsky
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
METHODS AND ARRANGEMENT FOR PLASMA DECHUCK OPTIMIZATION BASED ON CO...
Publication number
20110058302
Publication date
Mar 10, 2011
John C. Valcore, JR.
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR MEASURING WAFER BIAS POTENTIAL
Publication number
20110043228
Publication date
Feb 24, 2011
Konstantin Makhratchev
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR USING AN RC CIRCUIT TO MODEL TRAPPED CHARGE IN AN ELECTR...
Publication number
20100085679
Publication date
Apr 8, 2010
LAM RESEARCH CORPORATION
Konstantin Makhratchev
H01 - BASIC ELECTRIC ELEMENTS