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Kornelia Dittmar
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Dresden, DE
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last 30 patents
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Patent Grant
High yield plasma etch process for interlayer dielectrics
Patent number
8,062,982
Issue date
Nov 22, 2011
Advanced Micro Devices, Inc.
Daniel Fischer
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
HIGH YIELD PLASMA ETCH PROCESS FOR INTERLAYER DIELECTRICS
Publication number
20080202685
Publication date
Aug 28, 2008
Daniel Fischer
H01 - BASIC ELECTRIC ELEMENTS