Kosa Hirota

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and operational method thereof
- Patent number 11,424,110
- Issue date Aug 23, 2022
- HITACHI HIGH-TECH CORPORATION
- Masahito Togami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method
- Patent number 11,355,324
- Issue date Jun 7, 2022
- HITACHI HIGH-TECH CORPORATION
- Kosa Hirota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and operational method thereof
- Patent number 9,767,997
- Issue date Sep 19, 2017
- Hitachi High-Technologies Corporation
- Masahito Togami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 9,741,629
- Issue date Aug 22, 2017
- Hitachi High-Technologies Corporation
- Tatehito Usui
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20220375726
- Publication date Nov 24, 2022
- Kosa Hirota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220359166
- Publication date Nov 10, 2022
- Hitachi High-Tech Corporation
- Nanako Tamari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20220262606
- Publication date Aug 18, 2022
- HITACHI HIGH-TECH CORPORATION
- Kosa Hirota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20200294777
- Publication date Sep 17, 2020
- Hitachi High-Technologies Corporation
- Kosa HIROTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20200273683
- Publication date Aug 27, 2020
- Hitachi High-Technologies Corporation
- Yuta TAKAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND OPERATIONAL METHOD THEREOF
- Publication number 20170372878
- Publication date Dec 28, 2017
- Hitachi High-Technologies Corporation
- Masahito Togami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20170358504
- Publication date Dec 14, 2017
- Hitachi High-Technologies Corporation
- Tatehito USUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20160284610
- Publication date Sep 29, 2016
- Hitachi High-Technologies Corporation
- Tatehito USUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND OPERATIONAL METHOD THEREOF
- Publication number 20150021294
- Publication date Jan 22, 2015
- Hitachi High-Technologies Corporation
- Masahito Togami
- H01 - BASIC ELECTRIC ELEMENTS

Kosa Hirota

Person

Patents Grantslast 30 patents

Plasma processing apparatus and operational method thereof

Plasma processing method

Plasma processing apparatus and operational method thereof

Plasma processing apparatus and plasma processing method

Patents Applicationslast 30 patents

PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING METHOD

PLASMA PROCESSING METHOD

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND OPERATIONAL METHOD THEREOF

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND OPERATIONAL METHOD THEREOF