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Kosei Ueda

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  • Hwaseong-si, KR
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma etching method
    • Patent number 9,793,136
    • Issue date Oct 17, 2017
    • Tokyo Electron Limited
    • Kosei Ueda
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA ETCHING METHOD
    • Publication number 20160172205
    • Publication date Jun 16, 2016
    • TOKYO ELECTRON LIMITED
    • Kosei Ueda
    • H01 - BASIC ELECTRIC ELEMENTS