Koshi Muta

Person

Koshi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus
- Patent number 11,031,261
- Issue date Jun 8, 2021
- Tokyo Electron Limited
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing method, computer-readable storage medium and developing...
- Patent number 10,921,713
- Issue date Feb 16, 2021
- Tokyo Electron Limited
- Koshi Muta
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Developing method, computer-readable storage medium and developing...
- Patent number 10,459,340
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Koshi Muta
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Developing apparatus, developing method and storage medium
- Patent number 10,289,004
- Issue date May 14, 2019
- Tokyo Electron Limited
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Developing method, developing apparatus and storage medium
- Patent number 10,120,285
- Issue date Nov 6, 2018
- Tokyo Electron Limited
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liquid processing apparatus
- Patent number 10,014,190
- Issue date Jul 3, 2018
- Tokyo Electron Limited
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and storag...
- Patent number 9,947,556
- Issue date Apr 17, 2018
- Tokyo Electron Limited
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing method, developing apparatus, and recording medium
- Patent number 9,835,948
- Issue date Dec 5, 2017
- Tokyo Electron Limited
- Koshi Muta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing apparatus, developing method and storage medium
- Patent number 9,575,411
- Issue date Feb 21, 2017
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method, developing apparatus and storage medium
- Patent number 9,568,829
- Issue date Feb 14, 2017
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20240012329
- Publication date Jan 11, 2024
- TOKYO ELECTRON LIMITED
- Junghyun KIM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20240009697
- Publication date Jan 11, 2024
- TOKYO ELECTRON LIMITED
- Junghyun KIM
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Developing Method, Computer-Readable Storage Medium and Developing...
- Publication number 20190391496
- Publication date Dec 26, 2019
- TOKYO ELECTRON LIMITED
- Koshi MUTA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Liquid Processing Apparatus
- Publication number 20180308719
- Publication date Oct 25, 2018
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM
- Publication number 20170090291
- Publication date Mar 30, 2017
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM
- Publication number 20170045821
- Publication date Feb 16, 2017
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, MAINTE...
- Publication number 20170032983
- Publication date Feb 2, 2017
- TOKYO ELECTRON LIMITED
- Koshi MUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND DEVELOPING...
- Publication number 20160154311
- Publication date Jun 2, 2016
- TOKYO ELECTRON LIMITED
- Koshi MUTA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS, AND RECORDING MEDIUM
- Publication number 20160062240
- Publication date Mar 3, 2016
- TOKYO ELECTRON LIMITED
- Koshi Muta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM
- Publication number 20150036110
- Publication date Feb 5, 2015
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM
- Publication number 20150036109
- Publication date Feb 5, 2015
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND STORAG...
- Publication number 20150027492
- Publication date Jan 29, 2015
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20150027503
- Publication date Jan 29, 2015
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Liquid processing apparatus

Developing method, computer-readable storage medium and developing...

Developing method, computer-readable storage medium and developing...

Developing apparatus, developing method and storage medium

Developing method, developing apparatus and storage medium

Liquid processing apparatus

Substrate cleaning apparatus, substrate cleaning method, and storag...

Developing method, developing apparatus, and recording medium

Developing apparatus, developing method and storage medium

Developing method, developing apparatus and storage medium

Patents Applicationslast 30 patents

LIQUID PROCESSING APPARATUS

LIQUID PROCESSING APPARATUS

Developing Method, Computer-Readable Storage Medium and Developing...

Liquid Processing Apparatus

DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM

DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, MAINTE...

DEVELOPING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND DEVELOPING...

DEVELOPING METHOD, DEVELOPING APPARATUS, AND RECORDING MEDIUM

DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM

DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND STORAG...

LIQUID PROCESSING APPARATUS