Kosuke Fukuchi

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum processing apparatus and vacuum processing method
- Patent number 12,062,530
- Issue date Aug 13, 2024
- HITACHI HIGH-TECH CORPORATION
- Yusuke Yoshida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20240297027
- Publication date Sep 5, 2024
- Hitachi High-Tech Corporation
- Soichiro ETO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD
- Publication number 20210407776
- Publication date Dec 30, 2021
- HITACHI HIGH-TECH CORPORATION
- Yusuke Yoshida
- H01 - BASIC ELECTRIC ELEMENTS