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Kosuke FUKUDA
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Kumamoto, JP
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last 30 patents
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Patent Grant
Substrate solution-treatment apparatus, treatment solution supplyin...
Patent number
10,937,669
Issue date
Mar 2, 2021
Tokyo Electron Limited
Kosuke Fukuda
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20220399208
Publication date
Dec 15, 2022
TOKYO ELECTRON LIMITED
Hirofumi TAKEGUCHI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE SOLUTION-TREATMENT APPARATUS, TREATMENT SOLUTION SUPPLYIN...
Publication number
20180350636
Publication date
Dec 6, 2018
TOKYO ELECTRON LIMITED
Kosuke FUKUDA
H01 - BASIC ELECTRIC ELEMENTS