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Kosuke Imafuku
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Yamanashi, JP
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Patents Grants
last 30 patents
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Patent Grant
Method and system for removal of gas and plasma processing apparatus
Patent number
7,207,340
Issue date
Apr 24, 2007
Tokyo Electric Limited
Kosuke Imafuku
A62 - LIFE-SAVING FIRE-FIGHTING
Patents Applications
last 30 patents
Information
Patent Application
SILICON COMPONENT FOR PLASMA ETCHING APPARATUS
Publication number
20140294712
Publication date
Oct 2, 2014
Kosuke Imafuku
C30 - CRYSTAL GROWTH
Information
Patent Application
Method of processing quartz member for plasma processing device, qu...
Publication number
20040200804
Publication date
Oct 14, 2004
Norikazu Sugiyama
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
Vacuum processing device
Publication number
20040083970
Publication date
May 6, 2004
Kosuke Imafuku
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for regenerating container for plasma treatment, member insi...
Publication number
20040081746
Publication date
Apr 29, 2004
Kosuke Imafuku
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Gas removal method, gas removal system and plasma processing apparatus
Publication number
20040043721
Publication date
Mar 4, 2004
Kosuke Imafuku
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL