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Kosuke TAKAHASHI
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Oshu-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Monitoring apparatus of raw material tank and monitoring method of...
Patent number
11,073,851
Issue date
Jul 27, 2021
Tokyo Electron Limited
Kenta Horigome
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Nozzle and substrate processing apparatus using same
Patent number
10,472,719
Issue date
Nov 12, 2019
Tokyo Electron Limited
Yu Wamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus
Patent number
10,294,565
Issue date
May 21, 2019
Tokyo Electron Limited
Kiichi Takahashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of detoxifying exhaust pipe and film forming apparatus
Patent number
10,053,776
Issue date
Aug 21, 2018
Tokyo Electron Limited
Yu Wamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
9,929,008
Issue date
Mar 27, 2018
Tokyo Electron Limited
Yu Wamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
9,293,543
Issue date
Mar 22, 2016
Tokyo Electron Limited
Shuji Azumo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing a film using a turntable apparatus
Patent number
8,987,147
Issue date
Mar 24, 2015
Tokyo Electron Limited
Hiroaki Ikegawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film deposition method
Patent number
8,980,371
Issue date
Mar 17, 2015
Tokyo Electron Limited
Hiroaki Ikegawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing a film
Patent number
8,895,456
Issue date
Nov 25, 2014
Tokyo Electron Limited
Mitsuhiro Tachibana
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF MONITORING LIQUID RAW MATERIAL AND GAS SUPPLY DEVICE
Publication number
20250075322
Publication date
Mar 6, 2025
TOKYO ELECTRON LIMITED
Takuya HIGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION APPARATUS AND DEPOSITION METHOD
Publication number
20210087684
Publication date
Mar 25, 2021
TOKYO ELECTRON LIMITED
Yu SASAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MONITORING APPARATUS OF RAW MATERIAL TANK AND MONITORING METHOD OF...
Publication number
20200165720
Publication date
May 28, 2020
TOKYO ELECTRON LIMITED
Kenta Horigome
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film Forming Apparatus
Publication number
20180258527
Publication date
Sep 13, 2018
TOKYO ELECTRON LIMITED
Yu SASAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Processing Apparatus
Publication number
20170114461
Publication date
Apr 27, 2017
TOKYO ELECTRON LIMITED
Kiichi TAKAHASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF DETOXIFYING EXHAUST PIPE AND FILM FORMING APPARATUS
Publication number
20160220953
Publication date
Aug 4, 2016
TOKYO ELECTRON LIMITED
Yu Wamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NOZZLE AND SUBSTRATE PROCESSING APPARATUS USING SAME
Publication number
20160138158
Publication date
May 19, 2016
TOKYO ELECTRON LIMITED
Yu WAMURA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20160111278
Publication date
Apr 21, 2016
TOKYO ELECTRON LIMITED
Yu WAMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF DEPOSITING A FILM
Publication number
20140179122
Publication date
Jun 26, 2014
TOKYO ELECTRON LIMITED
Mitsuhiro Tachibana
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF DEPOSITING A FILM
Publication number
20140179121
Publication date
Jun 26, 2014
TOKYO ELECTRON LIMITED
Hiroaki IKEGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION METHOD, STORAGE MEDIUM, AND FILM DEPOSITION APPARATUS
Publication number
20140147591
Publication date
May 29, 2014
TOKYO ELECTRON LIMITED
Hiroaki IKEGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20140094027
Publication date
Apr 3, 2014
OSAKA UNIVERSITY
Shuji AZUMO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...