Kosuke Yoshihara

Person

Kumamoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Coating method and coating apparatus
- Patent number 12,216,406
- Issue date Feb 4, 2025
- Tokyo Electron Limited
- Yusaku Hashimoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating method, coating apparatus and recording medium
- Patent number 11,938,511
- Issue date Mar 26, 2024
- Tokyo Electron Limited
- Masatoshi Kawakita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method, substrate processing apparatus, and st...
- Patent number 11,693,319
- Issue date Jul 4, 2023
- Tokyo Electron Limited
- Keiichi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating method, coating apparatus and recording medium
- Patent number 11,407,005
- Issue date Aug 9, 2022
- Tokyo Electron Limited
- Masatoshi Kawakita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating treatment method, computer storage medium and coating treat...
- Patent number 11,065,639
- Issue date Jul 20, 2021
- Tokyo Electron Limited
- Shogo Inaba
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Resist solution supply apparatus, resist solution supply method, an...
- Patent number 8,453,599
- Issue date Jun 4, 2013
- Tokyo Electron Limited
- Kosuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for applying process solution
- Patent number 6,821,550
- Issue date Nov 23, 2004
- Tokyo Electron Limited
- Masatoshi Deguchi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Resist film forming method and resist coating apparatus
- Patent number 6,620,244
- Issue date Sep 16, 2003
- Tokyo Electron Limited
- Kosuke Yoshihara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Resist film forming method and resist coating apparatus
- Patent number 6,410,194
- Issue date Jun 25, 2002
- Tokyo Electron Limited
- Kosuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for applying process solution
- Patent number 6,281,145
- Issue date Aug 28, 2001
- Tokyo Electron Limited
- Masatoshi Deguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photoresist coating method and apparatus
- Patent number 6,117,486
- Issue date Sep 12, 2000
- Tokyo Electron Limited
- Kosuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of and apparatus for processing photoresist, method of evalu...
- Patent number 6,004,047
- Issue date Dec 21, 1999
- Tokyo Electron Limited
- Masami Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for developing resist coated on substrate
- Patent number 5,826,130
- Issue date Oct 20, 1998
- Tokyo Electron Limited
- Hideya Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for developing a resist-coated substrate
- Patent number 5,689,749
- Issue date Nov 18, 1997
- Tokyo Electron Limited
- Hideya Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMP...
- Publication number 20240249951
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Kosuke YOSHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMP...
- Publication number 20240120217
- Publication date Apr 11, 2024
- TOKYO ELECTRON LIMITED
- Shinichiro KAWAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING METHOD AND COATING APPARATUS
- Publication number 20220371047
- Publication date Nov 24, 2022
- Tokyo Electron Limited
- Yusaku HASHIMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING METHOD, COATING APPARATUS AND RECORDING MEDIUM
- Publication number 20220323990
- Publication date Oct 13, 2022
- TOKYO ELECTRON LIMITED
- Masatoshi Kawakita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20220113628
- Publication date Apr 14, 2022
- TOKYO ELECTRON LIMITED
- Keiichi TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING METHOD, COATING APPARATUS AND RECORDING MEDIUM
- Publication number 20200353503
- Publication date Nov 12, 2020
- TOKYO ELECTRON LIMITED
- Masatoshi Kawakita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND COATING TREAT...
- Publication number 20200147637
- Publication date May 14, 2020
- TOKYO ELECTRON LIMITED
- Shogo INABA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
RESIST SOLUTION SUPPLY APPARATUS, RESIST SOLUTION SUPPLY METHOD, AN...
- Publication number 20110045195
- Publication date Feb 24, 2011
- TOKYO ELECTRON LIMITED
- Kosuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Resist film forming method and resist coating apparatus
- Publication number 20020117111
- Publication date Aug 29, 2002
- Kosuke Yoshihara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Apparatus and method for applying process solution
- Publication number 20010037763
- Publication date Nov 8, 2001
- Masatoshi Deguchi
- H01 - BASIC ELECTRIC ELEMENTS

Kosuke Yoshihara

Person

Patents Grantslast 30 patents

Coating method and coating apparatus

Coating method, coating apparatus and recording medium

Substrate processing method, substrate processing apparatus, and st...

Coating method, coating apparatus and recording medium

Coating treatment method, computer storage medium and coating treat...

Resist solution supply apparatus, resist solution supply method, an...

Apparatus and method for applying process solution

Resist film forming method and resist coating apparatus

Resist film forming method and resist coating apparatus

Apparatus and method for applying process solution

Photoresist coating method and apparatus

Method of and apparatus for processing photoresist, method of evalu...

Apparatus and method for developing resist coated on substrate

Apparatus for developing a resist-coated substrate

Patents Applicationslast 30 patents

SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMP...

SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMP...

COATING METHOD AND COATING APPARATUS

COATING METHOD, COATING APPARATUS AND RECORDING MEDIUM

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

COATING METHOD, COATING APPARATUS AND RECORDING MEDIUM

COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND COATING TREAT...

RESIST SOLUTION SUPPLY APPARATUS, RESIST SOLUTION SUPPLY METHOD, AN...

Resist film forming method and resist coating apparatus

Apparatus and method for applying process solution