Kota Umezawa

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of growing gallium nitride-based crystal and heat treatment...
- Patent number 9,966,258
- Issue date May 8, 2018
- Tokyo Electron Limited
- Kota Umezawa
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor processing apparatus and method for using same
- Patent number 8,183,158
- Issue date May 22, 2012
- Tokyo Electron Limited
- Masahiko Tomita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and apparatus for semiconductor process
- Patent number 7,981,809
- Issue date Jul 19, 2011
- Tokyo Electron Limited
- Tetsuya Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation method and apparatus for semiconductor process
- Patent number 7,964,241
- Issue date Jun 21, 2011
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxidizing method and oxidizing unit for object to be processed
- Patent number 7,674,724
- Issue date Mar 9, 2010
- Tokyo Electron Limited
- Keisuke Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat processing method and apparatus for semiconductor process
- Patent number 7,605,095
- Issue date Oct 20, 2009
- Tokyo Electron Limited
- Toshiyuki Ikeuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxidation method and oxidation system
- Patent number 7,452,826
- Issue date Nov 18, 2008
- Tokyo Electron Limited
- Kazuhide Hasebe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxidizing method and oxidizing unit of object for object to be proc...
- Patent number 7,419,550
- Issue date Sep 2, 2008
- Tokyo Electron Limited
- Keisuke Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for treating article to be treated
- Patent number 7,208,428
- Issue date Apr 24, 2007
- Tokyo Electron Limited
- Shingo Hishiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxidation method and oxidation system
- Patent number 7,129,186
- Issue date Oct 31, 2006
- Tokyo Electron Limited
- Kazuhide Hasebe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxidizing method and oxidation system
- Patent number 6,599,845
- Issue date Jul 29, 2003
- Tokyo Electron Limited
- Shoichi Sato
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR FORMING CRYSTALLINE SILICON FILM
- Publication number 20230197447
- Publication date Jun 22, 2023
- TOKYO ELECTRON LIMITED
- Kota UMEZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE FILM FORMATION METHOD
- Publication number 20230175115
- Publication date Jun 8, 2023
- TOKYO ELECTRON LIMITED
- Shuji AZUMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS, AND STORAGE MEDIUM
- Publication number 20160265136
- Publication date Sep 15, 2016
- TOKYO ELECTRON LIMITED
- Kota UMEZAWA
- C30 - CRYSTAL GROWTH
Information Patent Application
Method of Growing Gallium Nitride-Based Crystal and Heat Treatment...
- Publication number 20150221512
- Publication date Aug 6, 2015
- TOKYO ELECTRON LIMITED
- Kota UMEZAWA
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF CLEANING FILM FORMING APPARATUS AND FILM FORMING APPARATUS
- Publication number 20140318457
- Publication date Oct 30, 2014
- TOKYO ELECTRON LIMITED
- Kota UMEZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS OF FORMING COMPOUND SEMICONDUCTOR FILM
- Publication number 20140038394
- Publication date Feb 6, 2014
- TOKYO ELECTRON LIMITED
- Yosuke WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING NITRIDE FILM
- Publication number 20120164848
- Publication date Jun 28, 2012
- TOKYO ELECTRON LIMITED
- Motoki FUJII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20110281443
- Publication date Nov 17, 2011
- TOKYO ELECTRON LIMITED
- Pao-Hwa CHOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation method and apparatus for semiconductor process
- Publication number 20080311760
- Publication date Dec 18, 2008
- Nobutake Nodera
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Oxidizing method and oxidizing unit for object to be processed
- Publication number 20080268654
- Publication date Oct 30, 2008
- Keisuke Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat processing method and apparatus for semiconductor process
- Publication number 20080200038
- Publication date Aug 21, 2008
- Toshiyuki Ikeuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor processing apparatus and method for using same
- Publication number 20080093023
- Publication date Apr 24, 2008
- Masahiko Tomita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation method and apparatus for semiconductor process
- Publication number 20080063791
- Publication date Mar 13, 2008
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum evacuation device and method, and substrate processing appar...
- Publication number 20070048145
- Publication date Mar 1, 2007
- Katsutoshi Ishii
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
Oxidation method and oxidation system
- Publication number 20060276051
- Publication date Dec 7, 2006
- Kazuhide Hasebe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Oxidizing method and oxidizing unit of object for object to be proc...
- Publication number 20060183343
- Publication date Aug 17, 2006
- Keisuke Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film formation method and apparatus for semiconductor process
- Publication number 20060128161
- Publication date Jun 15, 2006
- Tetsuya Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat treating system and heat treating method
- Publication number 20060099805
- Publication date May 11, 2006
- Takehiko Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of oxidizing object to be processed and oxidation system
- Publication number 20060003542
- Publication date Jan 5, 2006
- Keisuke Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Oxidation method and oxidation system
- Publication number 20050164518
- Publication date Jul 28, 2005
- Kazuhide Hasebe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing unit and thermal processing method
- Publication number 20050136693
- Publication date Jun 23, 2005
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for treating article to be treated
- Publication number 20040219793
- Publication date Nov 4, 2004
- Shingo Hishiya
- C30 - CRYSTAL GROWTH
Information Patent Application
Oxidizing method and oxidation system
- Publication number 20030224618
- Publication date Dec 4, 2003
- Shoichi Sato
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Oxidizing method and oxidation system
- Publication number 20020127873
- Publication date Sep 12, 2002
- Shoichi Sato
- C01 - INORGANIC CHEMISTRY

Kota Umezawa

Person

Patents Grantslast 30 patents

Method of growing gallium nitride-based crystal and heat treatment...

Semiconductor processing apparatus and method for using same

Film formation method and apparatus for semiconductor process

Film formation method and apparatus for semiconductor process

Oxidizing method and oxidizing unit for object to be processed

Heat processing method and apparatus for semiconductor process

Oxidation method and oxidation system

Oxidizing method and oxidizing unit of object for object to be proc...

Method and apparatus for treating article to be treated

Oxidation method and oxidation system

Oxidizing method and oxidation system

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR FORMING CRYSTALLINE SILICON FILM

SELECTIVE FILM FORMATION METHOD

FILM FORMING METHOD, FILM FORMING APPARATUS, AND STORAGE MEDIUM

Method of Growing Gallium Nitride-Based Crystal and Heat Treatment...

METHOD OF CLEANING FILM FORMING APPARATUS AND FILM FORMING APPARATUS

METHOD AND APPARATUS OF FORMING COMPOUND SEMICONDUCTOR FILM

METHOD FOR FORMING NITRIDE FILM

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

Film formation method and apparatus for semiconductor process

Oxidizing method and oxidizing unit for object to be processed

Heat processing method and apparatus for semiconductor process

Semiconductor processing apparatus and method for using same

Film formation method and apparatus for semiconductor process

Vacuum evacuation device and method, and substrate processing appar...

Oxidation method and oxidation system

Oxidizing method and oxidizing unit of object for object to be proc...

Film formation method and apparatus for semiconductor process

Heat treating system and heat treating method

Method of oxidizing object to be processed and oxidation system

Oxidation method and oxidation system

Thermal processing unit and thermal processing method

Method and apparatus for treating article to be treated

Oxidizing method and oxidation system

Oxidizing method and oxidation system