Kotaro Akutsu

Person

Saitama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus
- Patent number 7,391,496
- Issue date Jun 24, 2008
- Canon Kabushiki Kaisha
- Keiji Emoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Static gas bearing system, stage mechanism, exposure apparatus, and...
- Patent number 7,207,720
- Issue date Apr 24, 2007
- Canon Kabushiki Kaisha
- Choshoku Sai
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Substrate holding device, substrate processing apparatus using the...
- Patent number 7,123,350
- Issue date Oct 17, 2006
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,057,703
- Issue date Jun 6, 2006
- Canon Kabushiki Kaisha
- Keiji Emoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus
- Patent number 7,057,193
- Issue date Jun 6, 2006
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus
- Patent number 7,038,759
- Issue date May 2, 2006
- Canon Kabushiki Kaisha
- Keiji Emoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage system, exposure apparatus, and device manufacturing method
- Patent number 7,030,964
- Issue date Apr 18, 2006
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate processing apparatus
- Patent number 7,012,690
- Issue date Mar 14, 2006
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage system, exposure apparatus, and device manufacturing method
- Patent number 6,989,888
- Issue date Jan 24, 2006
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Electron beam exposure apparatus and semiconductor device manufactu...
- Patent number 6,930,756
- Issue date Aug 16, 2005
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 6,879,382
- Issue date Apr 12, 2005
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning device, exposure device, and device manufacturing method
- Patent number 6,359,679
- Issue date Mar 19, 2002
- Canon Kabushiki Kaisha
- Hirohito Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning system and position measuring method for use in exposur...
- Patent number 6,285,444
- Issue date Sep 4, 2001
- Canon Kabushiki Kaisha
- Eiji Osanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning apparatus and exposure apparatus using the same
- Patent number 6,028,376
- Issue date Feb 22, 2000
- Canon Kabushiki Kaisha
- Eiji Osanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device, method of controlling same, and exposure apparatus us...
- Patent number 6,008,882
- Issue date Dec 28, 1999
- Canon Kabushiki Kaisha
- Hirohito Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage feeding device
- Patent number 5,939,852
- Issue date Aug 17, 1999
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Stage apparatus and exposure apparatus and device producing method...
- Patent number 5,864,389
- Issue date Jan 26, 1999
- Canon Kabushiki Kaisha
- Eiji Osanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning system and method and apparatus for device manufacture
- Patent number 5,858,587
- Issue date Jan 12, 1999
- Canon Kabushiki Kaisha
- Yukio Yamane
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Moving stage apparatus and system using the same
- Patent number 5,726,548
- Issue date Mar 10, 1998
- Canon Kabushiki Kaisha
- Shinichi Chiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Weight supporting apparatus
- Patent number 5,701,041
- Issue date Dec 23, 1997
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for scanning original image having a plurality of mirrors...
- Patent number 5,585,627
- Issue date Dec 17, 1996
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- G02 - OPTICS
Information Patent Grant
Static pressure bearing device
- Patent number 5,382,095
- Issue date Jan 17, 1995
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for positioning control
- Patent number 5,184,055
- Issue date Feb 2, 1993
- Canon Kabushiki Kaisha
- Shinji Ohishi
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus
- Publication number 20060158650
- Publication date Jul 20, 2006
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage system, exposure apparatus, and device manufacturing method
- Publication number 20060082755
- Publication date Apr 20, 2006
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20060028629
- Publication date Feb 9, 2006
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20050213062
- Publication date Sep 29, 2005
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Static gas bearing system, stage mechanism, exposure apparatus, and...
- Publication number 20050129339
- Publication date Jun 16, 2005
- Canon Kabushiki Kaisha
- Choshoku Sai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing apparatus
- Publication number 20050099629
- Publication date May 12, 2005
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage system, exposure apparatus, and device manufacturing method
- Publication number 20050018166
- Publication date Jan 27, 2005
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate holding device, substrate processing apparatus using the...
- Publication number 20050018168
- Publication date Jan 27, 2005
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage system, exposure apparatus, and device manufacturing method
- Publication number 20050018165
- Publication date Jan 27, 2005
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Hydrostatic bearing, alignment apparatus, exposure apparatus, and d...
- Publication number 20050008269
- Publication date Jan 13, 2005
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20040041101
- Publication date Mar 4, 2004
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam exposure apparatus and semiconductor device manufactu...
- Publication number 20040012765
- Publication date Jan 22, 2004
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- B82 - NANO-TECHNOLOGY
Information Patent Application
Exposure apparatus
- Publication number 20030007136
- Publication date Jan 9, 2003
- Canon Kabushiki Kaisha
- Keiji Emoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20020132409
- Publication date Sep 19, 2002
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- H01 - BASIC ELECTRIC ELEMENTS

Kotaro Akutsu

Person

Patents Grantslast 30 patents

Exposure apparatus

Static gas bearing system, stage mechanism, exposure apparatus, and...

Substrate holding device, substrate processing apparatus using the...

Exposure apparatus

Exposure apparatus

Exposure apparatus

Stage system, exposure apparatus, and device manufacturing method

Substrate processing apparatus

Stage system, exposure apparatus, and device manufacturing method

Electron beam exposure apparatus and semiconductor device manufactu...

Substrate processing apparatus

Positioning device, exposure device, and device manufacturing method

Positioning system and position measuring method for use in exposur...

Positioning apparatus and exposure apparatus using the same

Stage device, method of controlling same, and exposure apparatus us...

Stage feeding device

Stage apparatus and exposure apparatus and device producing method...

Positioning system and method and apparatus for device manufacture

Moving stage apparatus and system using the same

Weight supporting apparatus

Apparatus for scanning original image having a plurality of mirrors...

Static pressure bearing device

Device for positioning control

Patents Applicationslast 30 patents

Substrate processing apparatus

Stage system, exposure apparatus, and device manufacturing method

Exposure apparatus

Exposure apparatus

Static gas bearing system, stage mechanism, exposure apparatus, and...

Substrate processing apparatus

Stage system, exposure apparatus, and device manufacturing method

Substrate holding device, substrate processing apparatus using the...

Stage system, exposure apparatus, and device manufacturing method

Hydrostatic bearing, alignment apparatus, exposure apparatus, and d...

Exposure apparatus

Electron beam exposure apparatus and semiconductor device manufactu...

Exposure apparatus

Substrate processing apparatus