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Kotaro Fujimoto

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  • Kudamatsu, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method for dry etching Al2O3 film
    • Patent number 8,506,834
    • Issue date Aug 13, 2013
    • Hitachi High-Technologies Corporation
    • Kentaro Yamada
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of cleaning etching apparatus
    • Patent number 7,662,235
    • Issue date Feb 16, 2010
    • Hitachi High-Technologies Corporation
    • Atsushi Yoshida
    • B08 - CLEANING
  • Information Patent Grant

    Plasma etching method
    • Patent number 7,186,659
    • Issue date Mar 6, 2007
    • Hitachi High-Technologies Corporation
    • Kotaro Fujimoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Dry etching method
    • Patent number 5,320,707
    • Issue date Jun 14, 1994
    • Hitachi, Ltd.
    • Tadamitsu Kanekiyo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sample treating method and apparatus
    • Patent number 4,985,113
    • Issue date Jan 15, 1991
    • Hitachi, Ltd.
    • Kotaro Fujimoto
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents