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Kotaro Miyatani
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Kofu-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for forming insulating film and method for manufacturing sem...
Patent number
9,640,388
Issue date
May 2, 2017
Tokyo Electron Limited
Shigeru Kasai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and recording medium
Patent number
8,383,519
Issue date
Feb 26, 2013
Tokyo Electron Limited
Toshihisa Nozawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method for forming a film and an electronic compo...
Patent number
8,021,975
Issue date
Sep 20, 2011
Tokyo Electron Limited
Kotaro Miyatani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing method and apparatus for removing oxide film
Patent number
6,776,874
Issue date
Aug 17, 2004
Tokyo Electron Limited
Yasuo Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing method and apparatus for removing oxide film
Patent number
6,706,334
Issue date
Mar 16, 2004
Tokyo Electron Limited
Yasuo Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20230137865
Publication date
May 4, 2023
TOKYO ELECTRON LIMITED
Takayuki KARAKAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM-FORMING METHOD, FILM-FORMING APPARATUS, AND OXIDATION METHOD
Publication number
20220068637
Publication date
Mar 3, 2022
Tokyo Electron Limited
Kotaro MIYATANI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND...
Publication number
20170092588
Publication date
Mar 30, 2017
Zeon Corporation
Kotaro Miyatani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING INSULATING FILM AND METHOD FOR MANUFACTURING SEM...
Publication number
20160240374
Publication date
Aug 18, 2016
TOKYO ELECTRON LIMITED
Shigeru KASAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20150170963
Publication date
Jun 18, 2015
TOKYO ELECTRON LIMITED
Tadahiro ISHIZAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTERLAYER INSULATING LAYER FORMING METHOD AND SEMICONDUCTOR DEVICE
Publication number
20130130513
Publication date
May 23, 2013
TOKYO ELECTRON LIMITED
Kotaro Miyatani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ETCHING METHOD AND RECORDING MEDIUM
Publication number
20100279510
Publication date
Nov 4, 2010
TOKYO ELECTRON LIMITED
Toshihisa Nozawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING METHOD OF POROUS FILM AND COMPUTER-READABLE RECORDING...
Publication number
20090053895
Publication date
Feb 26, 2009
TOKYO ELECTRON LIMITED
Yasuhiro OSHIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma processing method for forming a film and an electronic compo...
Publication number
20090026588
Publication date
Jan 29, 2009
TOKYO ELECTRON LIMITED
Kotaro Miyatani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Processing method and apparatus for removing oxide film
Publication number
20010015261
Publication date
Aug 23, 2001
TOKYO ELECTRO LIMITED
Yasuo Kobayashi
H01 - BASIC ELECTRIC ELEMENTS